Sub-180-nanometer-thick ultraconformable high-performance carbon nanotube-based dual-gate transistors and differential amplifiers

被引:0
作者
Wang, Yuru [1 ,2 ]
Wang, Tingzhi [1 ,2 ]
Xiang, Li [3 ]
Huang, Ruyi [4 ]
Long, Guanhua [1 ,2 ]
Wang, Wanyi [1 ,2 ]
Xi, Meiqi [1 ,2 ]
Tian, Jiamin [1 ,2 ]
Li, Wangchang [1 ,2 ]
Deng, Xiaosong [1 ,2 ]
Gong, Qibei [1 ,2 ]
Bai, Tianshun [1 ,2 ]
Chen, Yufan [1 ,2 ]
Liu, Hong [1 ,2 ]
Xia, Yu [1 ,2 ]
Liang, Xuelei [1 ,2 ]
Chen, Qing [1 ,2 ]
Peng, Lian-Mao [1 ,2 ,4 ]
Hu, Youfan [1 ,2 ,4 ]
机构
[1] Peking Univ, Ctr Carbon Based Elect, Key Lab Phys & Chem Nanodevices, Beijing 100871, Peoples R China
[2] Peking Univ, Sch Elect, Beijing 100871, Peoples R China
[3] Hunan Univ, Coll Mat Sci & Engn, Changsha 410082, Peoples R China
[4] Peking Univ, Acad Adv Interdisciplinary Studies, Beijing 100871, Peoples R China
来源
SCIENCE ADVANCES | 2024年 / 10卷 / 36期
基金
国家重点研发计划; 中国国家自然科学基金;
关键词
FIELD-EFFECT TRANSISTORS; INTEGRATED-CIRCUITS; YTTRIUM-OXIDE; ELECTRONICS; TECHNOLOGY; ULTRATHIN; DESIGN;
D O I
10.1126/sciadv.adq6022
中图分类号
O [数理科学和化学]; P [天文学、地球科学]; Q [生物科学]; N [自然科学总论];
学科分类号
07 ; 0710 ; 09 ;
摘要
There is increased interest in ultrathin flexible devices with thicknesses of <1 micrometers due to excellent conformability toward advanced laminated bioelectronics. However, because of limitations in materials, device structure, and fabrication methodology, the performance of these ultrathin devices and circuits is insufficient to support higher-level applications. Here, we report high-performance carbon nanotube-based thin-film transistors (TFTs) and differential amplifiers on ultrathin polyimide films with a total thickness of <180 nanometers. A dual-gate structure is introduced to guarantee excellent gate control efficiency and mechanical stability of the ultrathin TFTs, which exhibit high transconductance (8.96 microsiemens per micrometer), high mobility (127 square centimeters per volt per second), and steep subthreshold swing (84 millivolts per decade), and can sustain a bending radius of curvature of <10 micrometers. The differential amplifier achieves the highest gain-bandwidth product (1.83 megahertz) among flexible differential amplifiers, enabling higher-gain amplification of weak signals over an extended frequency spectrum that is demonstrated by amplification of electromyography signals in situ.
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页数:10
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