Blocking layer of dark current for Si-based short-wave infrared photodetection

被引:0
|
作者
Yu, Liang [1 ,2 ]
Wu, Li [1 ,2 ]
Dai, Xiyuan [1 ,2 ]
Yang, Yanru [1 ,2 ]
Yan, Zhongyao [1 ,2 ]
Liu, Kaixin [1 ,2 ]
Ma, Fengyang [1 ,2 ]
Lu, Ming [1 ,2 ,3 ]
Sun, Jian [1 ,2 ,3 ]
机构
[1] Fudan Univ, Sch Informat Sci & Technol, Dept Opt Sci & Engn, State Key Lab Photovolta Sci & Technol, Shanghai 200433, Peoples R China
[2] Fudan Univ, Shanghai Ultraprecis Opt Mfg Engn Ctr, Shanghai 200433, Peoples R China
[3] Fudan Univ, Yiwu Res Inst, Yiwu, Peoples R China
基金
中国国家自然科学基金;
关键词
OF-THE-ART; SUBSTRATE-TEMPERATURE; ELECTRICAL-PROPERTIES; SILICON; PLATINUM; DIFFUSION; IMPURITY; PHOTOTRANSISTORS; ABSORPTION; DETECTORS;
D O I
10.1063/5.0226677
中图分类号
O59 [应用物理学];
学科分类号
摘要
Effective suppression of dark current is essential for improving the performance of bulk defect-mediated absorption (BDA) photodetectors. Blocked impurity band (BIB) infrared detectors have been developed and utilized from mid-infrared to far-infrared wavelength regions for low noise. In this work, a blocking layer of dark current was applied to a BDA short-wave infrared (SWIR) photodetector, emulating the concept of BIB detectors. ZnO was chosen as the blocking layer to impede the transport of electrons from the bulk defect levels due to its wide bandgap and to allow the photocurrent to remain nearly unaffected by proper positioning of the conduction band minimum. After introducing the ZnO blocking layer, the dark current density of the photodetector was reduced by two orders of magnitude, and the specific detectivity was enhanced by one order of magnitude. The effects of TiO2 and WO3 as blocking layers were also investigated and compared with ZnO. This work offers an effective method for enhancing detectivity in SWIR BDA photodetection by suppressing the dark current efficiently.
引用
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页数:8
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