[1] Anhui Univ, Sch Mat Sci & Engn, Hefei 230601, Peoples R China
[2] Univ Sci & Technol China, Sch Microelect, Hefei 230022, Peoples R China
[3] Shanghai Univ Engn Sci, Sch Mech & Automot Engn, Shanghai 201620, Peoples R China
[4] Qingdao Univ, Inst Mat Energy & Environm, Coll Mat Sci & Engn, Qingdao 266071, Peoples R China
[5] East China Inst Photoelectron ICs, Suzhou 215163, Peoples R China
[6] Micronano Sensing Technol Hefei Co Ltd, Hefei 230088, Peoples R China