An Improved Method for Electromagnetic Calculations of Dynamically Varying Cantilever Beam RF-MEMS Switches

被引：0
|
作者：
Wang, Wei [1 ]
Wang, Jiawei [1 ]
Mao, Minyu [1 ]
Shao, Jinghui [1 ]
机构：
[1] Xi An Jiao Tong Univ, Sch Elect Engn, State Key Lab Elect Insulat & Power Equipment, Xian, Peoples R China
来源：
2024 IEEE 21ST BIENNIAL CONFERENCE ON ELECTROMAGNETIC FIELD COMPUTATION, CEFC 2024 | 2024年
关键词：
Coordinate transformation; dynamic beam; FDTD; RF MEMS switch;
D O I：
10.1109/CEFC61729.2024.10585885
中图分类号：
TP39 [计算机的应用];
学科分类号：
081203 ; 0835 ;
摘要：
In this paper, a numerical method based on finite difference time domain (FDTD) method is provided for analyzing electromagnetic characteristics of RF-MEMS switch with a dynamic cantilever beam in presence. The basic idea is transforming the original dynamic boundary problem to a static one via the map between two frames, one is the realistic physic frame and the other is the imaginary reference frame in which the beam is stationary. Under such a transformation, the FDTD-like time-marching scheme is formulated. The suggested method is then applied in a specific case for validation.
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页数：2
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