3D Nano-Printed Bistable Microlens Actuator for Reconfigurable Micro-Optical Systems

被引:5
作者
Calikoglu, Aybuke [1 ]
Lux, Florian [2 ]
Taege, Yanis [1 ]
Zappe, Hans [1 ]
Ataman, Caglar [2 ]
机构
[1] Univ Freiburg, Dept Microsyst Engn IMTEK, Lab Microopt, D-79110 Freiburg, Germany
[2] Univ Freiburg, Dept Microsyst Engn IMTEK, Microsyst Biomed Imaging Lab, D-79110 Freiburg, Germany
关键词
3D-printing; actuator; bistable mechanism; direct laser writing; magnetic actuation; micro-optics; 2-PHOTON POLYMERIZATION; ENDOSCOPIC DETECTION; COHERENCE; FABRICATION; MULTIPHOTON; PLATFORM; LENS;
D O I
10.1002/adfm.202408867
中图分类号
O6 [化学];
学科分类号
0703 ;
摘要
The integration of multiple functional microscopy methods into a single, miniaturized instrument, known as multimodal endomicroscopy, presents significant challenges due to the often conflicting optical requirements of each imaging modality. In this study, the use of 3D nano-printing based on two-photon polymerization for the monolithic manufacturing of complete optical MEMS devices is investigated as an enabling platform for multimodal endoscopy. This approach offers unparalleled miniaturization, design flexibility, and alignment precision of micro-optics and actuators. In particular, the design, fabrication, and characterization of a monolithically 3D nano-printed bistable microlens actuator are discussed. Bistability allows the microlens to switch between two stable positions, thereby changing the focus distance and numerical aperture. The actuator features two coils with opposing current directions, which create a magnetic field gradient around a polymer micro-magnet. This configuration allows for robust switching between stable positions with an average axial distance of 168.3 +/- 7.3 mu m. Experiments conducted to ascertain the optical characterization of the actuator demonstrate its capacity to transition between different optical modes. The beam widths are measured to be in the range of 4.1 +/- 0.2 mu m in the high-resolution mode and 11.3 +/- 1.1 mu m in the extended depth of focus mode. This work investigates the design, fabrication, and characterization of a 3D nano-printed bistable microlens actuator with magnetic actuation. Using two-photon polymerization, the device monolithically integrates mechanical and optical components. The actuator offers significant microlens displacement relative to its footprint. Mechanical and optical characterization tests demonstrate its potential for endoscopic imaging applications, providing high-resolution and extended depth of focus modes. image
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页数:11
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