Visible-Light Optical Phased Arrays with a Convex Grating Emitter on Implantable Neural Probes for Spatially Targeted Deep Brain Optogenetics

被引:0
作者
Sharma, Ankita [1 ,2 ]
Chen, Fu-Der [1 ,2 ]
Govdeli, Alperen [1 ,2 ]
Luo, Xianshu [3 ]
Chua, Hongyao [3 ]
Lo, Guo-Qiang [3 ]
Sacher, Wesley D. [1 ]
Poon, Joyce K. S. [1 ,2 ]
机构
[1] Max Planck Inst Microstruct Phys, Weinberg 2, D-06120 Halle, Germany
[2] Univ Toronto, Dept Elect & Comp Engn, 10 Kings Coll Rd, Toronto, ON M5S 3G4, Canada
[3] Adv Micro Foundry Pte Ltd, 11 Sci Pk Rd,Singapore Sci Pk 2, Singapore 117685, Singapore
来源
25TH EUROPEAN CONFERENCE ON INTEGRATED OPTICS, ECIO 2024 | 2024年 / 402卷
关键词
integrated optical phased arrays; visible-light; neural probes;
D O I
10.1007/978-3-031-63378-2_26
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
We demonstrate single-lobe beam-steering at lambda= 460-478 nm using an end-fire optical phased array coupled to a free-propagation region slab and convex grating for out-of-plane emission. Our design achieves sidelobe-free steering over 57% of the total maximum steering range 100 mu m away from the OPA. The devices were implemented in silicon nitride waveguides and integrated on implantable silicon neural probes for targeted optogenetics.
引用
收藏
页码:163 / 167
页数:5
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