A MEMS-Type Ionization Vacuum Sensor With a Wide Measurement Range

被引：4

作者：

Zhao, Yanqing ^{[1
]}

Li, Zhiwei ^{[1
]}

He, Yidan ^{[1
]}

Mao, Shuyu ^{[1
]}

Guo, Dengzhu ^{[1
]}

Wei, Xianlong ^{[1
]}

机构：

[1] Peking Univ, Sch Elect, Key Lab Phys & Chem Nanodevices, Beijing 100871, Peoples R China

来源：

IEEE ELECTRON DEVICE LETTERS | 2024年 / 45卷 / 05期

基金：

中国国家自然科学基金;

关键词：

Current measurement; Electron sources; Voltage measurement; Thermionic emission; Silicon; Pressure measurement; Impact ionization; Ionization vacuum sensor; microelectromechanical system (MEMS); yttrium oxide; thermionic emission;

D O I：

10.1109/LED.2024.3382769

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

The letter presents a MEMS-type ionization vacuum sensor based on electron emission from an on-chip thermionic electron source. The sensor employs a multilayer-stacked structure fabricated by anodic bonding technology, showing overall dimensions of 12 x 12 x 3.3 mm(3). Because of the efficient and stable electron emission of an yttrium oxide electron source, the sensor exhibits a wide linear response range from 1 x 10(-4) Pa to 100 Pa with a good repeatability, covering both high and medium vacuum regimes. It provides a new miniature vacuum sensor with a wide measurement range.

引用

页码：909 / 912

页数：4

共 22 条

[1]

[Anonymous], 2022, Technical Brochure of Thermal Conductivity Gauge XENTCG3880

[2] On-chip electron-impact ion source using carbon nanotube field emitters [J].

Bower, Christopher A. ;

Gilchrist, Kristin H. ;

Piascik, Jeffrey R. ;

Stoner, Brian R. ;

Natarajan, Srividya ;

Parker, Charles B. ;

Wolter, Scott D. ;

Glass, Jeffrey T. .

APPLIED PHYSICS LETTERS, 2007, 90 (12)

[3] MEMS type ionization vacuum sensor [J].

Grzebyk, T. ;

Gorecka-Drzazga, A. .

SENSORS AND ACTUATORS A-PHYSICAL, 2016, 246 :148-155

[4] Miniature capacitance diaphragm gauge for absolute vacuum measurement [J].

Han, Xiaodong ;

Li, Gang ;

Xu, Mahui ;

Guo, Chaomao ;

Wang, Yongjun ;

Feng, Yongjian ;

Li, Detian .

MEASUREMENT, 2022, 194

[5] Differential MEMS capacitance diaphragm vacuum gauge with high sensitivity and wide range [J].

Han, Xiaodong ;

Li, Gang ;

Xu, Mahui ;

Ke, Xin ;

Chen, Huiying ;

Feng, Yongjian ;

Yan, Huangping ;

Li, Detian .

VACUUM, 2021, 191

[6] Design and experiment of a touch mode MEMS capacitance vacuum gauge with square diaphragm [J].

Han, Xiaodong ;

Xu, Mahui ;

Li, Gang ;

Yan, Huangping ;

Feng, Yongjian ;

Li, Detian .

SENSORS AND ACTUATORS A-PHYSICAL, 2020, 313

[7] ELECTRON IMPACT IONIZATION CROSS-SECTION DATA FOR ATOMS ATOMIC IONS AND DIATOMIC MOLECULES .I. EXPERIMENTAL DATA [J].

KIEFFER, LJ ;

DUNN, GH .

REVIEWS OF MODERN PHYSICS, 1966, 38 (01) :1-&

[8] DEPENDENCE OF THE PRESSURE SENSITIVITY OF A QUARTZ OSCILLATOR ON ITS SIZE [J].

KOKUBUN, K ;

HIRATA, M ;

ONO, M ;

TANAKA, H ;

AIDA, R ;

NAGATA, A .

VACUUM, 1990, 40 (06) :521-524

[9] Wide dynamic range silicon diaphragm vacuum sensor by electrostatic servo system [J].

Miyashita, H ;

Esashi, M .

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, 2000, 18 (06) :2692-2697

[10] Wide range pressure sensor based on a piezoelectric bimorph microcantilever [J].

Mortet, V ;

Petersen, R ;

Haenen, K ;

D'Olieslaeger, M .

APPLIED PHYSICS LETTERS, 2006, 88 (13)

← 1 2 3 →