Influence of the tilted IDT on Nonlinear Harmonic Signals in SAW Resonators on LiNbO3/ SiO2/Si Structure

被引:0
作者
Lv, Guangyao [1 ]
Li, Baichuan [2 ]
Zhang, Qiaozhen [1 ]
Wu, Shuxian [3 ]
Bao, Feihong [3 ]
Fu, Sulei [4 ]
Wang, Weibiao
机构
[1] Shanghai Normal Univ, Coll Informat Mech & Elect Engn, Shanghai, Peoples R China
[2] Southeast Univ, Sch Mech Engn, Nanjing, Peoples R China
[3] Univ Elect Sci & Technol China, Yangtze Delta Reg Inst Huzhou, Huzhou, Peoples R China
[4] SHOULDER Elect Ltd, Wuxi, Peoples R China
来源
2024 IEEE MTT-S INTERNATIONAL CONFERENCE ON MICROWAVE ACOUSTICS & MECHANICS, IC-MAM | 2024年
基金
中国国家自然科学基金;
关键词
surface acoustic wave; nonlinearity; Harmonic response; tilted electrode; resonators;
D O I
10.1109/IC-MAM60575.2024.10539040
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
This paper investigates the nonlinear behavior of SAW resonators on 30 degrees YX-LiNbO3/SiO2/Si layered structure. The influence of the tilted IDT on the nonlinear harmonic signals generation in the SAW resonator is studied. The oneport resonators with different IDT electrodes tilted from 0 degrees to 16 degrees are fabricated. And the second-order harmonic and third-order nonlinear harmonic response of these resonators were measured and analyzed. Compared to the parallel electrodes case, the nonlinear harmonic level decreases by 10dBm with the tilted electrode. Meanwhile, the transverse mode of the resonator is effectively suppressed. It is concluded that the tilted electrodes technique is conducive to suppressing of the transverse mode and nonlinearity, simultaneously.
引用
收藏
页码:153 / 156
页数:4
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