Influence of the tilted IDT on Nonlinear Harmonic Signals in SAW Resonators on LiNbO3/ SiO2/Si Structure

被引:0
作者
Lv, Guangyao [1 ]
Li, Baichuan [2 ]
Zhang, Qiaozhen [1 ]
Wu, Shuxian [3 ]
Bao, Feihong [3 ]
Fu, Sulei [4 ]
Wang, Weibiao
机构
[1] Shanghai Normal Univ, Coll Informat Mech & Elect Engn, Shanghai, Peoples R China
[2] Southeast Univ, Sch Mech Engn, Nanjing, Peoples R China
[3] Univ Elect Sci & Technol China, Yangtze Delta Reg Inst Huzhou, Huzhou, Peoples R China
[4] SHOULDER Elect Ltd, Wuxi, Peoples R China
来源
2024 IEEE MTT-S INTERNATIONAL CONFERENCE ON MICROWAVE ACOUSTICS & MECHANICS, IC-MAM | 2024年
基金
中国国家自然科学基金;
关键词
surface acoustic wave; nonlinearity; Harmonic response; tilted electrode; resonators;
D O I
10.1109/IC-MAM60575.2024.10539040
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
This paper investigates the nonlinear behavior of SAW resonators on 30 degrees YX-LiNbO3/SiO2/Si layered structure. The influence of the tilted IDT on the nonlinear harmonic signals generation in the SAW resonator is studied. The oneport resonators with different IDT electrodes tilted from 0 degrees to 16 degrees are fabricated. And the second-order harmonic and third-order nonlinear harmonic response of these resonators were measured and analyzed. Compared to the parallel electrodes case, the nonlinear harmonic level decreases by 10dBm with the tilted electrode. Meanwhile, the transverse mode of the resonator is effectively suppressed. It is concluded that the tilted electrodes technique is conducive to suppressing of the transverse mode and nonlinearity, simultaneously.
引用
收藏
页码:153 / 156
页数:4
相关论文
共 15 条
  • [1] Chen Li, 2010, 2010 IEEE INT ULTR S
  • [2] Forster T., 2020, IEEE INT ULTRA SYM, P1, DOI DOI 10.1109/ius46767.2020.9251782
  • [3] Iwamoto H, 2018, IEEE INT ULTRA SYM
  • [4] Li Baichuan, 2023, 2023 IEEE INT ULTR S
  • [5] Materials, Design, and Characteristics of Bulk Acoustic Wave Resonator: A Review
    Liu, Yan
    Cai, Yao
    Zhang, Yi
    Tovstopyat, Alexander
    Liu, Sheng
    Sun, Chengliang
    [J]. MICROMACHINES, 2020, 11 (07)
  • [6] Comparative Study of Vector Measurement of Nonlinearity in SAW Devices Using Cross Domain Analyzer and Nonlinear Vector Network Analyzer
    Nakagawa, Ryo
    Gawasawa, Masahiro
    Kyoya, Haruki
    Hashimoto, Ken-Ya
    [J]. 2022 IEEE INTERNATIONAL ULTRASONICS SYMPOSIUM (IEEE IUS), 2022,
  • [7] Nakagawa R, 2016, IEEE INT ULTRA SYM
  • [8] Discussion about generation mechanisms of third-order nonlinear signals in surface acoustic wave resonators based on simulation
    Nakagawa, Ryo
    Suzuki, Takanao
    Shimizu, Hiroshi
    Kyoya, Haruki
    Nako, Katsuhiro
    Hashimoto, Ken-ya
    [J]. JAPANESE JOURNAL OF APPLIED PHYSICS, 2016, 55 (07)
  • [9] Nakamura H., 2012, 2012 IEEE INT ULTR S
  • [10] Impact of Transverse Mode Resonances on Second Harmonic Generation in Radio-frequency Bulk Acoustic Wave Resonators
    Qiu, Luyan
    Li, Xinyi
    Matsuoka, Naoto
    Omori, Tatsuya
    Hashimoto, Ken-ya
    [J]. JAPANESE JOURNAL OF APPLIED PHYSICS, 2019, 58 (SG)