A Mode-localized Resonant Accelerometer Based on A Novel Micro-lever Coupler Resistant to Manufacture Process Defects

被引：0

作者：

Wang, Bowen ^{[1
,2
]}

Wang, Kunfeng ^{[1
,2
]}

Wang, Zheng ^{[3
]}

Xiong, Xinyin ^{[1
]}

Zhai, Zhaoyang ^{[1
,2
]}

Yang, Wuhao ^{[1
]}

Zou, Xudong ^{[1
,2
,3
]}

机构：

[1] Chinese Acad Sci, Aerosp Informat Res Inst, State Key Lab Transducer Technol, Beijing, Peoples R China

[2] Univ Chinese Acad Sci, Sch Elect Elect & Commun Engn, Beijing, Peoples R China

[3] QiLu Aerosp Informat Res Inst, Jinan, Peoples R China

来源：

2024 IEEE INTERNATIONAL SYMPOSIUM ON INERTIAL SENSORS AND SYSTEMS, INERTIAL | 2024年

关键词：

mode-localized; accelerometer; coupler; manufacture process defects;

D O I：

10.1109/INERTIAL60399.2024.10502031

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

The mode-localized resonant accelerometer (MLRXL) described in this study is developed with a unique micro-level mechanical coupling mechanism that protects it from manufacturing process defects and ensures that the coupling stiffness of fabrication is the same as desired value.

引用

页数：4