Advances of materials science in MEMS applications: A review

被引:28
作者
Hossain, Nayem [1 ]
Al Mahmud, Md Zobair [1 ]
Hossain, Amran [1 ]
Rahman, Md Khaledur [2 ]
Islam, Md Saiful [2 ]
Tasnim, Rumana [3 ]
Mobarak, Md Hosne [1 ]
机构
[1] IUBAT Int Univ Business Agr & Technol, Dept Mech Engn, Dhaka, Bangladesh
[2] IUBAT Int Univ Business Agr & Technol, Dept Elect & Elect Engn, Dhaka, Bangladesh
[3] World Univ Bangladesh WUB, Dept Mechatron Engn, Dhaka, Bangladesh
关键词
MEMS; Fabrication; Materials science; Biosensors; Applications; VOLATILE-ORGANIC-COMPOUNDS; DRUG-DELIVERY; SENSORS; SYSTEMS; GLUCOSE; TECHNOLOGIES; BIOSENSORS; ARRAYS; DEVICE;
D O I
10.1016/j.rineng.2024.102115
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
MEMS, or microelectromechanical systems, have greatly transformed multiple industries with their small size and adaptable capabilities. MEMS technology in biosensing allows for rapid and accurate identification of biological analytes, assisting in medical diagnoses and therapies. MEMS-based biosensors provide label-free detection, improving early disease screening and customized medicine administration. MEMS devices in healthcare enable uninterrupted patient monitoring and telemedicine, leading to substantial enhancements in healthcare results. Nevertheless, obstacles remain, such as the requirement for improved biocompatibility and durability under very demanding conditions. In order to overcome these restrictions, current research is dedicated to advancing materials that are compatible with living organisms, improving processes used to create small-scale structures, and incorporating wireless monitoring systems. To fully exploit the capabilities of MEMS biosensors, it is crucial to prioritize these improvements. This will facilitate their smooth integration into different industries and contribute to the industry 's significant growth.
引用
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页数:13
相关论文
共 160 条
[11]   Detection of volatile-organic-compounds (VOCs) in solution using cantilever-based gas sensors [J].
Bao, Yuyang ;
Xu, Pengcheng ;
Cai, Shengran ;
Yu, Haitao ;
Li, Xinxin .
TALANTA, 2018, 182 :148-155
[12]  
Barua R., 2018, Design and Development of Affordable Healthcare Technologies, P165
[13]  
Basu A.K., 2021, Introduction to MEMS in Biology and Healthcare, P1, DOI [10.1063/9780735423954001, DOI 10.1063/9780735423954001]
[14]   MEMS-Based Tactile Sensors: Materials, Processes and Applications in Robotics [J].
Bayer, Ilker S. .
MICROMACHINES, 2022, 13 (12)
[15]   Minimally-invasive Microneedle-based Biosensor Array for Simultaneous Lactate and Glucose Monitoring in Artificial Interstitial Fluid [J].
Bollella, Paolo ;
Sharma, Sanjiv ;
Cass, Anthony Edward George ;
Antiochia, Riccarda .
ELECTROANALYSIS, 2019, 31 (02) :374-382
[16]   The 2021 flexible and printed electronics roadmap [J].
Bonnassieux, Yvan ;
Brabec, Christoph J. ;
Cao, Yong ;
Carmichael, Tricia Breen ;
Chabinyc, Michael L. ;
Cheng, Kwang-Ting ;
Cho, Gyoujin ;
Chung, Anjung ;
Cobb, Corie L. ;
Distler, Andreas ;
Egelhaaf, Hans-Joachim ;
Grau, Gerd ;
Guo, Xiaojun ;
Haghiashtiani, Ghazaleh ;
Huang, Tsung-Ching ;
Hussain, Muhammad M. ;
Iniguez, Benjamin ;
Lee, Taik-Min ;
Li, Ling ;
Ma, Yuguang ;
Ma, Dongge ;
McAlpine, Michael C. ;
Ng, Tse Nga ;
osterbacka, Ronald ;
Patel, Shrayesh N. ;
Peng, Junbiao ;
Peng, Huisheng ;
Rivnay, Jonathan ;
Shao, Leilai ;
Steingart, Daniel ;
Street, Robert A. ;
Subramanian, Vivek ;
Torsi, Luisa ;
Wu, Yunyun .
FLEXIBLE AND PRINTED ELECTRONICS, 2021, 6 (02)
[17]   Environmental Monitoring: A Comprehensive Review on Optical Waveguide and Fiber-Based Sensors [J].
Butt, Muhammad A. ;
Voronkov, Grigory S. ;
Grakhova, Elizaveta P. ;
Kutluyarov, Ruslan V. ;
Kazanskiy, Nikolay L. ;
Khonina, Svetlana N. .
BIOSENSORS-BASEL, 2022, 12 (11)
[18]   A fast CUM-m-Capon Algorithm for DOA Estimation Based on Fourth-order Cumulant [J].
Chao, Kaikai ;
Zhang, Xinyu ;
Huo, Kai ;
Jiang, Weidong .
THIRD INTERNATIONAL WORKSHOP ON PATTERN RECOGNITION, 2018, 10828
[19]  
Chaudhary R.K., 2023, Biomaterials-Based Sensors: Recent Advances and Applications, DOI 10.1007/978-981-19-8501-012
[20]   Electrocatalytic oxidation of glucose on bronze for monitoring of saliva glucose using a smart toothbrush [J].
Chen, Jian ;
Zhu, Xiaofei ;
Ju, Yinhui ;
Ma, Biao ;
Zhao, Chao ;
Liu, Hong .
SENSORS AND ACTUATORS B-CHEMICAL, 2019, 285 :56-61