Reliability of Quasi-vertical GaN on Silicon Schottky Barrier Diodes With SiO2 Passivation Layer Under On-State Stress Bias

被引:0
作者
Lin, Ya-Xun [1 ,2 ]
Chao, Der-Sheng [3 ]
Liang, Jenq-Horng [4 ,5 ]
Shen, Yao-Luen [6 ]
Huang, Chih-Fang [5 ]
Hall, Steve [1 ]
Mitrovic, Ivona Z. [1 ]
机构
[1] Univ Liverpool, Dept Elect Engn & Elect, Liverpool L69 3GJ, England
[2] Natl Tsing Hua Univ, Dept Engn & Syst Sci, Hsinchu 300, Taiwan
[3] Natl Tsing Hua Univ, Nucl Sci & Technol Dev Ctr, Hsinchu 300, Taiwan
[4] Natl Tsing Hua Univ, Dept Engn & Syst Sci, Hsinchu 300, Taiwan
[5] Natl Tsing Hua Univ, Inst Nucl Engn & Sci, Hsinchu 300, Taiwan
[6] Natl Tsing Hua Univ, Inst Elect Engn, Hsinchu 300, Taiwan
关键词
Stress; Passivation; Reliability; Degradation; Gallium nitride; Wide band gap semiconductors; Schottky diodes; GaN on Si; ON-state stress; quasivertical Schottky barrier diodes (SBDs); TECHNOLOGY SUPERIOR RELIABILITY; DEVICES;
D O I
10.1109/TED.2024.3433310
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
ON-state stress induced device degradation of gallium nitride quasivertical Schottky barrier diode (SBD)with SiO2 passivation layer was investigated in this article.The devices were stressed at room temperature by biasing them separately at three distinct voltages for 500 s. The longer-term degradation was seen to be dominated pre-dominantly by electron trapping in the oxide passivation layer. Less-severe degradation was observed in passivateddevices in comparison with control devices without SiO2 passivation. The control devices were found to exhibit degradation due to the influence of bulk traps near to the metal/GaN interface. Moreover, the anode was held at zero voltage for 500 s to analyse the electron de-trapping mechanism during the recovery phase of SBDs. Current-voltage characteristics of the SBDs were measured to monitor the evolution of forward voltage and barrier height through periodic interruption under stress and recovery.A power-law model and universal recovery function were utilized to evaluate the parameter shifts with respect to time for each phase, respectively. The results demonstrate that border and bulk oxide traps associated with the passivation layer lead to the trapping and de-trapping of electrons
引用
收藏
页码:5296 / 5304
页数:9
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