Ultra-Small Size Micro-LEDs With Enhanced Efficiency for Near-Eye Display

被引：11

作者：

Xu, Feifan ^{[1
]}

Tao, Tao ^{[1
]}

Zhang, Dongqi ^{[1
]}

Sang, Yimeng ^{[1
]}

Yu, Junchi ^{[1
]}

He, Honghui ^{[1
]}

Huang, Jinpeng ^{[1
]}

Zhi, Ting ^{[2
,3
]}

Zhuang, Zhe ^{[4
]}

Xie, Zili ^{[1
]}

Zhang, Rong ^{[1
,5
]}

Liu, Bin ^{[1
]}

机构：

[1] Nanjing Univ, Sch Elect Sci & Engn, Jiangsu Prov Key Lab Adv Photon & Elect Mat, Nanjing 210093, Peoples R China

[2] Nanjing Univ Posts & Telecommun, Coll Elect & Opt Engn, Nanjing 210093, Peoples R China

[3] Nanjing Univ Posts & Telecommun, Coll Microelect, Nanjing 210093, Peoples R China

[4] Nanjing Univ, Sch Integrated Circuits, Suzhou 215163, Peoples R China

[5] Xiamen Univ, Tan Kah Kee Innovat Lab, Xiamen 361005, Peoples R China

来源：

IEEE ELECTRON DEVICE LETTERS | 2024年 / 45卷 / 07期

关键词：

Radiative recombination; Plasmas; Optical device fabrication; Semiconductor diodes; Optical surface waves; Light emitting diodes; Brightness; Micro light-emitting diodes (Micro-LEDs); passivation; efficiency; near-eye display; LIGHT-EMITTING-DIODES;

D O I：

10.1109/LED.2024.3401132

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

Micro Light-emitting diodes (Micro-LEDs) array for near-eye display with pixel dimensions of 1.3x1.5 mu m(2) were fabricated, corresponding to a resolution of 10040 pixels per inch (PPI). Optimized N2O plasma treatment process was deployed to minimize the sidewall non-radiative recombination and increase radiative efficiency of Micro-LEDs. The experimental results demonstrated a significant improvement in external quantum efficiency (EQE) of blue and green Micro-LEDs, with peak EQE of 22.3% and 19.3%, respectively. High brightness and optical power density was acquired exceeding 5x10(7) nits and 7x10(4) mW/cm(2). And excellent wavelength and efficiency stability were demonstrated with respect to the temperature. This results illustrate an immense potential of Micro-LEDs for high resolution near-eye display applications.

引用

页码：1241 / 1244

页数：4

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