Design of a 1 x 3 Power Splitter Based on Multimode Interference in a Parabolic-Type Slot-Waveguide Structure

Multimode interference (MMI) couplers based on silicon slot-waveguide structures have received widespread attention in recent years. The key issues that need to be addressed are the size and loss of such devices. This study introduces a 1 x 3 silicon-based slot-waveguide multimode interference power splitter. The device uses a gallium-nitride slot-waveguide structure to reduce the length of the coupling region and decrease additional losses. To reduce the width of the coupling region, the multimode interference coupling area is designed with a parabolic-shaped structure. The introduction of a tapered structure between the input/output waveguides and the coupling region improves additional losses and non-uniformity. Furthermore, we conducted an analysis of the fabrication tolerances of the coupling region. In this paper, we use mode solution to simulate the design of the device in the 1550 nm optical wavelength range. The eigenmode expansion method is used to simulate and optimize the parameters of the device. The device is simulated using the eigenmode expansion solver. The simulation results show that the total length of the coupling region for the device is only 4 mu m. The normalized transmission of the device is 0.992, and its excess loss and imbalance are 0.036 dB and 0.003 dB, respectively. The proposed power splitter can be applied to integrated optical circuit design, optical sensing, and optical power measurement.