Autonomous Robot Orchestration Solution for OHT with Machine Learning and Digital Twin

被引:0
作者
Park, Jinhyeok [1 ,4 ]
Shin, Donghwi [4 ]
Hong, Sangpyo [1 ,2 ,4 ]
Hwang, Illhoe [1 ,4 ]
Hwang, Seol [1 ,4 ]
Jang, Young Jae [3 ,4 ]
Lee, Jaeho [3 ,4 ]
Lee, Jaeung [3 ,4 ]
机构
[1] DAIM Res Corp, Boca Raton, FL 33434 USA
[2] SK Hynix Corp, San Jose, CA USA
[3] Korea Adv Inst Sci & Technol, Daejeon, South Korea
[4] Korea Adv Inst Sci & Technol KAIST, 291 Daehak Ro, Daejeon 34141, South Korea
来源
2024 35TH ANNUAL SEMI ADVANCED SEMICONDUCTOR MANUFACTURING CONFERENCE, ASMC | 2024年
基金
新加坡国家研究基金会;
关键词
Autonomous Robot Orchestration Solution; Overhead Hoist Transport; Digital Twin;
D O I
10.1109/ASMC61125.2024.10545448
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
Autonomous Robot Orchestration Solution (AROS) is revolutionizing robot fleet management. AROS identifies the state and environment of each robot and enables them to achieve common goals collaboratively. In this paper, we introduce AROS and its application in controlling massive Overhead Hoist Transport (OHT) vehicles in semiconductor fabs. Key technologies in AROS include reinforcement learning algorithms and deep auto-encoder models. Digital Twin (DT) replicates the real system in a virtual environment with real-time communication to enhance decision-making for OHTs. We demonstrate the positive impact of AROS on OHT system performance, reducing average delivery times and increasing delivery capacity. AROS anomaly detection algorithm and health monitoring solution handle unexpected errors. This eliminates the need for human intervention. Our findings are supported by real use cases in large-scale semiconductor fabs.
引用
收藏
页数:6
相关论文
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