Universal Fourier optics model for virtual confocal microscopes

被引：0

作者：

Rosenthal, Felix ^{[1
]}

Pahl, Tobias ^{[1
]}

Eckhardt, Tim ^{[1
]}

Hagemeier, Sebastian ^{[1
]}

Compagnone, Jonas ^{[1
]}

Czasch, Tim ^{[1
]}

Diehl, Michael ^{[1
]}

Koops, Richard ^{[2
]}

Lehmann, Peter ^{[1
]}

机构：

[1] Univ Kassel, Fac Elect Engn & Comp Sci, Measurement Technol Grp, Wilhelmshoeher Allee 71, D-34121 Kassel, Germany

[2] VSL Natl Metrol Inst, Thijsseweg 11, NL-2629 JA Delft, Netherlands

来源：

OPTICS AND PHOTONICS FOR ADVANCED DIMENSIONAL METROLOGY III | 2024年 / 12997卷

关键词：

confocal microscopy; three-dimensional transfer function; surface topography measurement; RECONSTRUCTION;

D O I：

10.1117/12.3017579

中图分类号：

TP18 [人工智能理论];

学科分类号：

081104 ; 0812 ; 0835 ; 1405 ;

摘要：

Three-dimensional transfer functions generally provide a comprehensive description of the transfer behavior of optical topography measuring instruments in spatial frequency domain. Recently, an analytical derivation of the transfer function has been achieved and based on this, the so-called universal Fourier optics (UFO) model has been developed for virtual coherence scanning interferometry (CSI). Especially for 3D surface topographies, simulation models suffer from long simulation times, even if the scattering process is considered approximately. The UFO model reduces the simulation time to a number of 2D FFTs (Fast Fourier Transforms) of a phase object enabling modeling of realistic 3D topographies in reasonable time for the first time. Besides CSI, also confocal microscopy (CM) is a widely used optical profiling technique and hence, this study presents a UFO model for CM considering lateral as well as depth scanning. The opportunities provided by modeling are demonstrated simulating confocal image stacks for realistic 3D surface topographies.

引用

页数：8

共 31 条

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