Flexural-Mode Piezoelectric Resonators: Structure, Performance, and Emerging Applications in Physical Sensing Technology, Micropower Systems, and Biomedicine

被引:3
|
作者
Cai, Xianfa [1 ]
Wang, Yiqin [1 ]
Cao, Yunqi [2 ]
Yang, Wenyu [3 ]
Xia, Tian [4 ]
Li, Wei [5 ]
机构
[1] Nanjing Univ Posts & Telecommun, Coll Integrated Circuit Sci & Engn, Nanjing 210046, Peoples R China
[2] Zhejiang Univ, Coll Control Sci & Engn, State Key Lab Ind Control Technol, Hangzhou 310027, Peoples R China
[3] Huazhong Univ Sci & Technol, Sch Mech Sci & Engn, Wuhan 430074, Peoples R China
[4] Univ Vermont, Dept Elect & Biomed Engn, Burlington, VT 05405 USA
[5] Univ Vermont, Dept Mech Engn, Burlington, VT 05405 USA
关键词
piezoelectricity; resonator; flexural mode; micropower; sensor; biomedicine; ENERGY HARVESTER; TUNING FORK; FREQUENCY-SHIFT; DYNAMICS; DESIGN; SENSOR; MEMS; NANOPARTICLES; NANOGENERATOR; TRANSITION;
D O I
10.3390/s24113625
中图分类号
O65 [分析化学];
学科分类号
070302 ; 081704 ;
摘要
Piezoelectric material-based devices have garnered considerable attention from scientists and engineers due to their unique physical characteristics, resulting in numerous intriguing and practical applications. Among these, flexural-mode piezoelectric resonators (FMPRs) are progressively gaining prominence due to their compact, precise, and efficient performance in diverse applications. FMPRs, resonators that utilize one- or two-dimensional piezoelectric materials as their resonant structure, vibrate in a flexural mode. The resonant properties of the resonator directly influence its performance, making in-depth research into the resonant characteristics of FMPRs practically significant for optimizing their design and enhancing their performance. With the swift advancement of micro-nano electronic technology, the application range of FMPRs continues to broaden. These resonators, representing a domain of piezoelectric material application in micro-nanoelectromechanical systems, have found extensive use in the field of physical sensing and are starting to be used in micropower systems and biomedicine. This paper reviews the structure, working principle, resonance characteristics, applications, and future prospects of FMPRs.
引用
收藏
页数:21
相关论文
empty
未找到相关数据