Recent progress in heterogeneous integration on the silicon nitride platform using micro-transfer printing

被引:0
|
作者
Billet, Maximilien [1 ]
Vanackere, Tom [1 ,2 ]
Vandekerckhove, Tom [1 ,2 ]
Niels, Margot [1 ]
Reis, Luis [1 ,2 ]
Maes, Dennis [1 ,3 ]
Kiewiet, Max [1 ]
Akritidis, Konstantinos [1 ]
Cuyvers, Stijn [1 ]
Poelman, Stijn [1 ]
Reep, Tom [1 ]
Oliva, Valeria Bonito [1 ]
Leo, Francois [2 ]
Roelkens, Gunther [1 ]
Kuyken, Bart [1 ]
机构
[1] Univ Ghent, Photon Res Grp, INTEC, Imec, Ghent, Belgium
[2] Univ Libre Bruxelles, OPERA Photon, Brussels, Belgium
[3] CNRS, Inst Elect Microelect & Nanotechnol, UMR 8520, Villeneuve Dascq, France
来源
SILICON PHOTONICS XIX | 2024年 / 12891卷
关键词
Heterogenous integration; Transfer printing; Silicon nitride; Silicon photonics; III-V; Lithium niobate;
D O I
10.1117/12.2691017
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
Photonic integrated circuits enable the miniaturization of photonic systems by integrating key optical functions on a chip. While CMOS compatible silicon and silicon nitride are very efficient platforms for passive circuits, they lack active key functionalities for the realization of a full system on a chip. A versatile solution is to use micro-transfer printing for heterogeneous integration of active devices on such platforms. Here we present the recent advances of micro-transfer printing on silicon nitride and discuss the remaining challenges.
引用
收藏
页数:4
相关论文
共 50 条
  • [21] Demonstration of Micro-transfer Printing Thick Optical Components on Glass and Silicon Wafers
    Wakeel, Saif
    Morrissey, Padraic E.
    Hwang, HowYuan
    O'Brien, Peter
    25TH EUROPEAN CONFERENCE ON INTEGRATED OPTICS, ECIO 2024, 2024, 402 : 76 - 81
  • [22] Integration of Edge-Emitting Quantum Dot Lasers With Different Waveguide Platforms Using Micro-Transfer Printing
    Uzun, Ali
    Atar, Fatih Bilge
    Iadanza, Simone
    Loi, Ruggero
    Zhang, Jing
    Roelkens, Gunther
    Krestnikov, Igor
    Rimbock, Johanna
    O'Faolain, Liam
    Corbett, Brian
    IEEE JOURNAL OF SELECTED TOPICS IN QUANTUM ELECTRONICS, 2023, 29 (04)
  • [23] Inorganic light-emitting diode displays using micro-transfer printing
    Cok, Ronald S.
    Meitl, Matthew
    Rotzoll, Robert
    Melnik, George
    Fecioru, Alin
    Trindade, Antonio Jose
    Raymond, Brook
    Bonafede, Salvatore
    Gomez, David
    Moore, Tanya
    Prevatte, Carl
    Radauscher, Erich
    Goodwin, Scott
    Hines, Paul
    Bower, Christopher A.
    JOURNAL OF THE SOCIETY FOR INFORMATION DISPLAY, 2017, 25 (10) : 589 - 609
  • [24] Programmable micro-transfer-printing for heterogeneous material integration
    Wang, Yunda
    Solberg, Scott
    Lu, JengPing
    Wang, Qian
    Chang, Norine
    Schwartz, David
    Chintapalli, Mahati
    AIP ADVANCES, 2022, 12 (06)
  • [25] Selective Micro-Transfer Printing of Microspheres Using Adhesion-Switchable Stamp
    Yang, Lizhou
    Guo, Qinhua
    Zhang, Jingyang
    Gan, Yawen
    Wang, Yunda
    2024 IEEE 19TH INTERNATIONAL CONFERENCE ON NANO/MICRO ENGINEERED AND MOLECULAR SYSTEMS, NEMS 2024, 2024,
  • [26] Scalable transfer printing approach to heterogeneous integration of InP lasers on silicon-on-insulator waveguide platform
    Ghosh, Samir
    O'Callaghan, James
    Moynihan, Owen
    Huang, Duanni
    Frish, Harel
    Rong, Haisheng
    Thomas, Kevin
    Pelucchi, Emanuele
    Corbett, Brian
    APPLIED PHYSICS LETTERS, 2024, 125 (08)
  • [27] Si/InP Heterogeneous Integration Techniques from the Wafer-Scale (Hybrid Wafer Bonding) to the Discrete Transistor (Micro-Transfer Printing)
    Carter, Andrew D.
    Urteaga, Miguel E.
    Griffith, Zachary M.
    Lee, Kang-Jin
    Roderick, Jonathan
    Rowell, Petra
    Bergman, Joshua
    Hong, Sankgi
    Patti, Robert
    Petteway, Carl
    Fountain, Gill
    Ghosel, Kanchan
    Bower, Christopher A.
    2018 IEEE SOI-3D-SUBTHRESHOLD MICROELECTRONICS TECHNOLOGY UNIFIED CONFERENCE (S3S), 2018,
  • [28] Micro-transfer printed InGaAs photodetector on SOI platform
    Muthuganesan, Hemalatha
    Mura, Enrica
    Pelucchi, Emanuele
    Littlejohns, Callum
    Yan, Xingzhao
    Banakar, Mehdi
    Tran, Ying
    Corbett, Brian
    2023 IEEE SILICON PHOTONICS CONFERENCE, SIPHOTONICS, 2023,
  • [29] Electrical characterization of alkane monolayers using micro-transfer printing:: tunneling and molecular transport
    Kreuter, C.
    Baechle, S.
    Scheer, E.
    Erbe, A.
    NEW JOURNAL OF PHYSICS, 2008, 10
  • [30] Micro-transfer printed silicon nitride grating couplers for efficient on-chip light coupling
    Liu, Zuyang
    Muliuk, Grigorij
    Zhang, Jing
    Roelkens, Gunther
    Le Thomas, Nicolas
    Baets, Roel
    INTEGRATED OPTICS: DEVICES, MATERIALS, AND TECHNOLOGIES XXVI, 2022, 12004