Offset compensation for differential charge-based capacitance measurement

被引:0
作者
Cascone, Nicolo [1 ]
Cassalini, Mirko [1 ,2 ]
Ferlito, Umberto [1 ]
Grasso, Alfio Dario [2 ]
Bruno, Giuseppe [1 ]
机构
[1] STMicroelectron, Catania, Italy
[2] Univ Catania, Dipartimento Ingn Elettr Elettron & Informat DIEEI, Catania, Italy
关键词
capacitance measurement; capacitive sensors; CBCM; charge-based capacitance measurement; mismatch compensation; SENSOR;
D O I
10.1002/cta.4114
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
This paper presents a fully integrated differential charge-based capacitance measurement (CBCM) circuit designed to detect attoFarads capacitive variations to find airborne particulate matter (PM). This paper presents a novel method for compensating the output offset of the CBCM electronic front-end in the range of 3.1-3.4 V through the trimming of the bulk voltage of key transistors of the circuit topology. Experimental results on prototypes implemented using a 130-nm CMOS technology and driven by a 100-MHz clock confirm the validity of the proposed approach. The paper discusses a novel offset compensation technique for the Charge-Based Capacitive Measurement (CBCM) method. The proposed solution involves adjusting the threshold voltage of PMOS transistors to correct mismatches, enhancing circuit performance without additional hardware. image
引用
收藏
页码:5961 / 5971
页数:11
相关论文
共 21 条
  • [1] A 2.2 mA 4.3 mm2 ASIC for a 1000°/s 2-Axis Capacitive Micro-Gyroscope
    Aaltonen, Lasse
    Kalanti, Antti
    Pulkkinen, Mika
    Paavola, Matti
    Kamarainen, Mika
    Halonen, Kari A. I.
    [J]. IEEE JOURNAL OF SOLID-STATE CIRCUITS, 2011, 46 (07) : 1682 - 1692
  • [2] An on-chip, attofarad interconnect charge-based capacitance measurement (CBCM) technique
    Chen, JC
    McGaughy, BW
    Sylvester, D
    Hu, CM
    [J]. IEDM - INTERNATIONAL ELECTRON DEVICES MEETING, TECHNICAL DIGEST 1996, 1996, : 69 - 72
  • [3] A semicylindrical capacitive sensor with interface circuit used for flow rate measurement
    Chiang, Cheng-Ta
    Huang, Yu-Chung
    [J]. IEEE SENSORS JOURNAL, 2006, 6 (06) : 1564 - 1570
  • [4] Multichannel 65 zF rms Resolution CMOS Monolithic Capacitive Sensor for Counting Single Micrometer-Sized Airborne Particles on Chip
    Ciccarella, Pietro
    Carminati, Marco
    Sampietro, Marco
    Ferrari, Giorgio
    [J]. IEEE JOURNAL OF SOLID-STATE CIRCUITS, 2016, 51 (11) : 2545 - 2553
  • [5] An Automatic Offset Calibration Method for Differential Charge-Based Capacitance Measurement
    Ferlito, Umberto
    Grasso, Alfio Dario
    Vaiana, Michele
    Bruno, Giuseppe
    [J]. JOURNAL OF LOW POWER ELECTRONICS AND APPLICATIONS, 2021, 11 (02)
  • [6] Sub-Femto-Farad Resolution Electronic Interfaces for Integrated Capacitive Sensors: A Review
    Ferlito, Umberto
    Grasso, Alfio Dario
    Pennisi, Salvatore
    Vaiana, Michele
    Bruno, Giuseppe
    [J]. IEEE ACCESS, 2020, 8 (08): : 153969 - 153980
  • [7] Forouhi S, 2017, MIDWEST SYMP CIRCUIT, P92, DOI 10.1109/MWSCAS.2017.8052868
  • [8] A Hybrid Microfluidic/CMOS Capacitive Sensor Dedicated to Lab-on-Chip Applications
    Ghafar-Zadeh, Ebrahim
    Sawan, Mohamad
    [J]. IEEE TRANSACTIONS ON BIOMEDICAL CIRCUITS AND SYSTEMS, 2007, 1 (04) : 270 - 277
  • [9] Flexible Capacitive Humidity Sensor based on Fluorinated Graphene
    Hajian, S.
    Zhang, X.
    Maddipatla, D.
    Narakathu, B. B.
    Rodriguez-Labra, J. I.
    Blair, R. G.
    Atashbar, M. Z.
    [J]. 2019 IEEE SENSORS, 2019,
  • [10] Kim Moo jin., 2005, NEW CAPACITIVE DISPL, V1, P559