Comparative study of RF sputtered Fe2O3- and Fe3O4-doped indium saving indium tin oxide thin films

被引：0
|
作者：
Petrovska, Svitlana [1 ]
Sergiienko, Ruslan [2 ]
Ilkiv, Bogdan [1 ]
Nakamura, Takashi [3 ]
Ohtsuka, Makoto [3 ]
机构：
[1] Natl Acad Sci Ukraine, Frantsevich Inst Problems Mat Sci, 3 Omeliana Pritsaka Str, UA-03142 Kiev, Ukraine
[2] Natl Acad Sci Ukraine, Physicotechnol Inst Met & Alloys, Kiev, Ukraine
[3] Tohoku Univ, IMRAM, Sendai 9808577, Japan
来源：
MOLECULAR CRYSTALS AND LIQUID CRYSTALS | 2024年 / 768卷 / 08期
关键词：
Electrical properties; iron-doped indium tin oxide; optical properties; radio frequency sputtering; surface roughness; ELECTRICAL-PROPERTIES; ITO FILMS; TRANSPARENT;
D O I：
10.1080/15421406.2024.2348192
中图分类号：
O6 [化学];
学科分类号：
0703 ;
摘要：
In present work the properties of iron-doped indium tin oxide (ITO) films with reduced to 50 mass% indium oxide content prepared by co-sputtering of ITO and Fe2O3 targets and ITO and Fe3O4 targets in mixed argon-oxygen atmosphere were studied by various methods. The influence of different working gas flow rates, RF power of iron oxide targets, type of doping oxide and heat treatment temperatures on the electrical, optical, structural, and morphological properties of the films was characterized by means of four-point probe method, ultraviolet-visible (UV-Vis) spectroscopy, X-ray diffraction and atomic force microscopy.
引用
收藏
页码：128 / 138
页数：11
相关论文
共 50 条
  • [1] Multilayer Fe3O4-doped ITO indium saving indium tin oxide thin films
    Petrovska, S.
    Sergiienko, R.
    Ilkiv, B.
    Nakamura, T.
    Ohtsuka, M.
    MOLECULAR CRYSTALS AND LIQUID CRYSTALS, 2025, 769 (02) : 226 - 233
  • [2] DC sputtered iron-doped indium saving indium tin oxide thin films using Fe3O4 target
    Petrovska, Svitlana
    Sergiienko, Rruslan
    Nakamura, Takashi
    Ohtsuka, Makoto
    MOLECULAR CRYSTALS AND LIQUID CRYSTALS, 2023, 767 (01) : 70 - 78
  • [3] Iron-doped indium saving indium-tin oxide (ITO) thin films sputtered on preheated substrates
    Ohtsuka, M.
    Sergiienko, R.
    Petrovska, S.
    Ilkiv, B.
    Nakamura, T.
    OPTIK, 2019, 179 : 19 - 28
  • [4] Structural, optical and electrical properties of DC sputtered indium saving indium-tin oxide (ITO) thin films
    Voisin, Leandro
    Ohtsuka, Makoto
    Petrovska, Svitlana
    Sergiienko, Ruslan
    Nakamura, Takashi
    OPTIK, 2018, 156 : 728 - 737
  • [5] Influence of sputtering power on optical, electrical properties and structure of aluminum-doped indium saving indium-tin oxide thin films sputtered on preheated substrates
    Petrovska, S.
    Sergiienko, R.
    Ilkiv, B.
    Nakamura, T.
    Ohtsuka, M.
    MOLECULAR CRYSTALS AND LIQUID CRYSTALS, 2023, 751 (01) : 100 - 108
  • [6] Influence of thermal treatment in N2 atmosphere on chemical, microstructural and optical properties of indium tin oxide and nitrogen doped indium tin oxide rf-sputtered thin films
    Stroescu, H.
    Anastasescu, M.
    Preda, S.
    Nicolescu, M.
    Stoica, M.
    Stefan, N.
    Kampylafka, V.
    Aperathitis, E.
    Modreanu, M.
    Zaharescu, M.
    Gartner, M.
    THIN SOLID FILMS, 2013, 541 : 121 - 126
  • [7] Properties of RF magnetron sputtered indium tin oxide thin films on externally unheated glass substrate
    Patel, K. J.
    Desai, M. S.
    Panchal, C. J.
    JOURNAL OF MATERIALS SCIENCE-MATERIALS IN ELECTRONICS, 2011, 22 (08) : 959 - 965
  • [8] Effect of Oxygen Flow Rate on Properties of Aluminum-Doped Indium-Saving Indium Tin Oxide (ITO) Thin Films Sputtered on Preheated Glass Substrates
    Petrovska, Svitlana
    Sergiienko, Ruslan
    Ilkiv, Bogdan
    Nakamura, Takashi
    Ohtsuka, Makoto
    METALS, 2021, 11 (10)
  • [9] Aqueous chemical growth of α-Fe2O3-α-Cr2O3 nanocomposite thin films
    Vayssieres, L
    Guo, JH
    Nordgren, J
    JOURNAL OF NANOSCIENCE AND NANOTECHNOLOGY, 2001, 1 (04) : 385 - 388
  • [10] Bi2O3 doped indium tin oxide thin films fabricated via liquid metal printing
    Chen, Xueqing
    Du, Bangdeng
    Li, Qian
    Liu, Jing
    JOURNAL OF ALLOYS AND COMPOUNDS, 2024, 976
12345