[1] Chinese Acad Sci, Inst Microelect, Key Lab Fabricat Technol Integrated Circuits, Beijing 100029, Peoples R China
[2] Univ Chinese Acad Sci, Beijing 100049, Peoples R China
[3] Global Hlth Drug Discovery Inst, Beijing 100192, Peoples R China
[4] Shenzhen Univ, Coll Phys & Optoelect Engn, Key Lab Optoelect Devices & Syst, Minist Educ & Guangdong Prov, Shenzhen 518060, Peoples R China
[5] Huazhong Univ Sci & Technol, Sch Mat Sci & Engn, State Key Lab Mat Proc & Die & Mould Technol, Wuhan 430074, Peoples R China
[6] Univ Hong Kong, Dept Elect & Elect Engn, Hong Kong 999077, Peoples R China