Ultra Responsive NO2 silicon nanowires gas sensor

被引：9

作者：

Brophy, Rachel Elizabeth ^{[1
]}

Junker, Benjamin ^{[2
,3
]}

Fakhri, Elham Aghabalei ^{[1
]}

Arnason, Hakon Orn ^{[1
]}

Svavarsson, Halldor Guofinnur ^{[1
]}

Weimar, Udo ^{[2
,3
]}

Barsan, Nicolae ^{[2
,3
]}

Manolescu, Andrei ^{[1
]}

机构：

[1] Reykjavik Univ, Dept Engn, Menntavegur 1, IS-102 Reykjavik, Iceland

[2] Univ Tubingen, Inst Phys & Theoret Chem, Morgenstelle 15, D-72076 Tubingen, Germany

[3] Univ Tubingen, Ctr Light Matter Interact Sensors & Analyt LISA, Morgenstelle 15, D-72076 Tubingen, Germany

来源：

SENSORS AND ACTUATORS B-CHEMICAL | 2024年 / 410卷

关键词：

Gas sensor; Silicon nanowires; Humidity sensor; Nitrogen dioxide; ROOM-TEMPERATURE; ADSORPTION;

D O I：

10.1016/j.snb.2024.135648

中图分类号：

O65 [分析化学];

学科分类号：

070302 ; 081704 ;

摘要：

Nitrogen dioxide (NO2) is a hazardous gas emitted primarily from burning fossil fuels. When inhaled, it can have severe health implications, particularly for individuals with respiratory conditions such as asthma. It contributes to ground -level ozone formation, which can cause reduced lung function and increased susceptibility to respiratory infections. When in contact with water moisture in the air, NO2 is easily oxidized into nitric acid (HNO3), causing acid rain. Detection of NO2 levels is therefore important for monitoring air quality and protecting public health. Among the possible technical solutions for gas sensing, silicon nanowires (SiNWs) have proven to be a promising candidate, partly due to their high sensitivity, low manufacturing cost, and ability to perform in various air qualities. This paper presents using SiNWs, fabricated by metal -assisted chemical etching, as a fast, accurate, sensitive, robust, and cost-effective NO2 gas sensor. Our SiNWs gas sensor can experimentally detect 20 parts per billion (ppb) of NO2 under a wide range of relative humidity. Our sensor shows ultra -high sensitivity with fast response and recovery time.

引用

页数：6

共 21 条

[11] Silicon Nanowires Synthesis by Metal-Assisted Chemical Etching: A Review[J]. Leonardi, Antonio Alessio;Lo Faro, Maria Jose;Irrera, Alessia. NANOMATERIALS, 2021(02)
[12] Investigation of capacitive humidity sensing behavior of silicon nanowires[J]. Li, Huilin;Zhang, Jian;Tao, BaiRui;Wan, LiJuan;Gong, WenLi. PHYSICA E-LOW-DIMENSIONAL SYSTEMS & NANOSTRUCTURES, 2009(04)
[13] THE ONSET OF THE THERMAL-OXIDATION OF SILICON FROM ROOM-TEMPERATURE TO 1000-DEGREES-C[J]. MASSOUD, HZ. MICROELECTRONIC ENGINEERING, 1995(1-4)
[14] ADSORPTION OF WATER ON SIO2, AL2O3, AND SIO2.AL2O3 - RELATION BETWEEN AMOUNTS OF PHYSISORBED AND CHEMISORBED WATER[J]. MORIMOTO, T;NAGAO, M;IMAI, J. BULLETIN OF THE CHEMICAL SOCIETY OF JAPAN, 1971(05)
[15] Occupational Safety and Health Administration, 2017, Technical Report
[16] Structure and electrical behavior of silicon nanowires prepared by MACE process[J]. Plugaru, R.;Fakhri, E.;Romanitan, C.;Mihalache, I.;Craciun, G.;Plugaru, N.;Arnason, H. O.;Sultan, M. T.;Nemnes, G. A.;Ingvarsson, S.;Svavarsson, H. G.;Manolescu, A. SURFACES AND INTERFACES, 2022
[17] Enhanced humidity resistance of porous SiNWs via OTS functionalization for rarefied NO2 detection[J]. Qin, Yuxiang;Jiang, Yunqing;Zhao, Liming. SENSORS AND ACTUATORS B-CHEMICAL, 2019
[18] Advances in silicon nanowire applications in energy generation, storage, sensing, and electronics: a review[J]. Raman, Srinivasan;Sankar, A. Ravi;Sindhuja, M. NANOTECHNOLOGY, 2023(18)
[19] Large arrays of ultra-high aspect ratio periodic silicon nanowires obtained via top-down route[J]. Svavarsson, Halldor Gudfinnur;Hallgrimsson, Birgir Hrafn;Niraula, Manoj;Lee, Kyu Jin;Magnusson, Robert. APPLIED PHYSICS A-MATERIALS SCIENCE & PROCESSING, 2016(02)
[20] Fabrication and modeling of high sensitivity humidity sensors based on doped silicon nanowires[J]. Taghinejad, H.;Taghinejad, M.;Abdolahad, M.;Saeidi, A.;Mohajerzadeh, S. SENSORS AND ACTUATORS B-CHEMICAL, 2013

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