Enthalpy-Driven Self-Healing in Thin Metallic Films on Flexible Substrates

被引:5
作者
Trost, Claus Othmar Wolfgang [1 ]
Lassnig, Alice [1 ,2 ]
Kreiml, Patrice [1 ,3 ]
Joerg, Tanja [4 ,5 ]
Terziyska, Velislava L. [4 ]
Mitterer, Christian. [4 ]
Cordill, Megan Jo [1 ,4 ]
机构
[1] Austrian Acad Sci, Erich Schmid Inst Mat Sci, Jahnstr 12, A-8700 Leoben, Styria, Austria
[2] Univ Calif Berkeley, Dept Mat Sci & Engn, 170 Hearst Mem Min Bldg, Berkeley, CA 94720 USA
[3] Infineon Technol Austria AG, A-9500 Villach, Carinthia, Austria
[4] Montan Univ Leoben, Dept Mat Sci, Jahnstr 12, A-8700 Leoben, Styria, Austria
[5] Austria Technol & Systemtechn AT&S Aktiengesellsch, Fabriksgasse 13, A-8700 Leoben, Styria, Austria
基金
奥地利科学基金会;
关键词
flexible substrates; metastable alloy; MoAg; self-healing; thin films; OXYGEN EVOLUTION; CATALYSTS; GRAPHENE; CARRIER; CO;
D O I
10.1002/adma.202401007
中图分类号
O6 [化学];
学科分类号
0703 ;
摘要
Self-healing microelectronics are needed for costly applications with limited or without access. They are needed in fields such as space exploration to increase lifetime and decrease both costs and the environmental impact. While advanced self-healing mechanisms for polymers are numerous, practical ways for self-healing in metal films have yet to be found. A concept for an autonomous intrinsic self-healing metallic film system is developed, allowing the healing of cracks in metallic films on flexible substrates. The concept relies on stabilizing metastable thin films with high mixing enthalpy via segregation barriers. This allows the films to possess autonomous intrinsic self-healing capabilities triggered by cracking at temperatures not detrimental to flexible microelectronics. The effect will be shown on metastable Mo1-xAgx thin films, stabilized via a Mo segregation barrier. Without a segregation barrier, the system is known to exhibit spontaneous Ag particle formation on the surface. This property is controlled and directed to heal cracks and partially restore the electro-mechanical properties of the multilayer system. This mechanism opens up the field of self-healing thin metallic films that could profoundly impact the design of future microelectronics. Metastable thin Mo1-xAgx films exhibit self-healing properties. The system can be stabilized by a segregation barrier. Upon cracking, the barrier directs Ag segregations into the cracks instead of to the surface. The effect is autonomously intrinsic, occurs at room temperature, and it is enhanced with increasing temperature. Cracking of thin metal films causes damage to the flexible polymer substrate. image
引用
收藏
页数:11
相关论文
共 83 条
[1]  
[Anonymous], 2022, UBE Corporation, Polyimide Business Department, UPILEX Ultra heatresistant films (Grade details)
[2]   Growth control of molybdenum thin films with simultaneously improved adhesion and conductivity via sputtering for thin film solar cell application [J].
Bansal, Neetu ;
Pandey, Kaushlendra ;
Singh, K. ;
Mohanty, Bhaskar Chandra .
VACUUM, 2019, 161 :347-352
[3]  
Baolong G., 2021, Phys. B, V602
[4]   Autonomous healing of fatigue cracks via cold welding [J].
Barr, Christopher M. ;
Ta Duong ;
Bufford, Daniel C. ;
Milne, Zachary ;
Molkeri, Abhilash ;
Heckman, Nathan M. ;
Adams, David P. ;
Srivastava, Ankit ;
Hattar, Khalid ;
Demkowicz, Michael J. ;
Boyce, Brad L. .
NATURE, 2023, 620 (7974) :552-+
[5]   Analysis of the multi-cracking mechanism of brittle thin films on elastic-plastic substrates [J].
Ben Cheikh, I ;
Parry, G. ;
Dalmas, D. ;
Estevez, R. ;
Marthelot, J. .
INTERNATIONAL JOURNAL OF SOLIDS AND STRUCTURES, 2019, 180 :176-188
[6]   Morphological, electrical and optical properties of sputtered Mo thin films on flexible substrates [J].
Bollero, A. ;
Andres, M. ;
Garcia, C. ;
de Abajo, J. ;
Gutierrez, T. .
PHYSICA STATUS SOLIDI A-APPLICATIONS AND MATERIALS SCIENCE, 2009, 206 (03) :540-546
[7]   A bio-sensing surface with high biocompatibility for enhancing Raman scattering signals as enabled by a Mo-Ag film [J].
Chen, Dongzhen ;
Li, Yang ;
Wang, Lijun ;
Wang, Yingjie ;
Ning, Pan ;
Shum, Powan ;
He, Xinhai ;
Fu, Tao .
ANALYST, 2022, 147 (07) :1385-1393
[8]  
Chen S-F., 2015, Atlas Journal of Material Sciences, V2, P54
[9]   Duplex nanocrystalline alloys: Entropic nanostructure stabilization and a case study on W-Cr [J].
Chookajorn, Tongjai ;
Park, Mansoo ;
Schuh, Christopher A. .
JOURNAL OF MATERIALS RESEARCH, 2015, 30 (02) :151-163
[10]   Film thickness and architecture effects in biaxially strained polymer supported Al/Mo bilayers [J].
Cordill, M. J. ;
Kreiml, P. ;
Putz, B. ;
Trost, C. O. W. ;
Lassnig, A. ;
Mitterer, C. ;
Faurie, D. ;
Renault, P-O .
MATERIALS TODAY COMMUNICATIONS, 2022, 31