Review of surface acoustic wave-based hydrogen sensor

被引：10

作者：

Cui, Baile ^{[1
,2
]}

Ren, Zixuan ^{[1
,2
]}

Wang, Wen ^{[1
,2
]}

Cheng, Lina ^{[1
,2
]}

Gao, Xu ^{[1
,2
]}

Huang, Lintaihui ^{[2
]}

Hu, Anyu ^{[1
,2
]}

Hu, Fanbing ^{[1
,2
]}

Jin, Jing ^{[1
]}

机构：

[1] Chinese Acad Sci, State Key Lab Acoust, Inst Acoust, Beijing 100190, Peoples R China

[2] Univ Chinese Acad Sci, Beijing 100190, Peoples R China

来源：

SENSORS AND ACTUATORS REPORTS | 2024年 / 7卷

基金：

中国国家自然科学基金;

关键词：

SAW; H; 2; sensor; Sensing materials; Sensing mechanisms; Sensing devices; Sensing circuits; GAS SENSOR; THIN-FILM; BILAYER STRUCTURES; YOUNGS MODULUS; FAST-RESPONSE; SAW; PALLADIUM; CONDUCTIVITY; MECHANISM; PD;

D O I：

10.1016/j.snr.2024.100197

中图分类号：

Q81 [生物工程学（生物技术）]; Q93 [微生物学];

学科分类号：

071005 ; 0836 ; 090102 ; 100705 ;

摘要：

Hydrogen (H2) sensors with excellent performance play an important role in the safety application of H2 energy. Among current H2 detection technologies, surface acoustic wave (SAW) based H2 sensors attract more attention due to their features of high sensitivity, fast response, mico-nano scale and excellent stability, which was composed of a SAW sensing chip and sensing materials depositing along the acoustic wave propagation path, and utilizing the coupling mechanism of force-acoustic-electric multiple physical fields. Here we review the SAW H2 sensor, focusing on the H2 sensing materials, SAW sensing mechanisms, sensing devices, sensing circuits, and development status. And prospects were made for its development trends and challenges.

引用

页数：12

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