Effect of Oxidant Concentration on the Oxide Layer Thickness of 304 Stainless Steel

被引:0
作者
Wang, Kerong [1 ,2 ]
Liu, Haixu [1 ]
Liu, Ning [1 ]
Chen, Xiaoming [1 ]
Chen, Jiapeng [1 ,3 ,4 ,5 ]
机构
[1] Nanjing Univ Aeronaut & Astronaut, Coll Mech & Elect Engn, Jiangsu Key Lab Precis & Micromfg Technol, Nanjing 210016, Peoples R China
[2] Jinhua Polytech, Mech & Elect Engn Coll, Jinhua 321000, Peoples R China
[3] Shanghai Univ Engn Sci, Res Ctr Adv Micro Nano Fabricat Mat, Sch Chem & Chem Engn, Shanghai 201620, Peoples R China
[4] Zhengzhou Abras Grinding Res Inst Co Ltd, State Key Lab High Performance Tools, Zhengzhou 450001, Peoples R China
[5] Zhejiang Univ, State Key Lab Silicon & Adv Semicond Mat, Hangzhou 310027, Peoples R China
关键词
304 stainless steel; nano-scratch; oxide layer; electrochemical corrosion; 316L STAINLESS-STEEL; CORROSION-RESISTANCE;
D O I
10.3390/ma17122816
中图分类号
O64 [物理化学(理论化学)、化学物理学];
学科分类号
070304 ; 081704 ;
摘要
Ultra-thin 304 stainless steel can be used to flexibly display substrates after they have been subjected to chemical mechanical polishing (CMP). The thickness of the chemical oxide layer directly affects the polishing efficiency and surface quality of 304 stainless steel. In the study presented in the following paper, the thickness variation of the chemical oxide layer of 304 stainless steel was analyzed following electrochemical corrosion under different oxidant concentration conditions. Furthermore, the impact of the oxidant concentration on the grooves, chips, and scratch depth-displacement-load curves was investigated during a nano-scratching experiment. Through this process, we were able to reveal the chemical reaction mechanism between 304 stainless steel materials and oxidizers. The corrosion rate was found to be faster at 8% oxidant content. The maximum values of the scratch depth and elastic-plastic critical load were determined to be 2153 nm and 58.47 mN, respectively.
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页数:11
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