[1] Nanjing Univ Aeronaut & Astronaut, Coll Mech & Elect Engn, Jiangsu Key Lab Precis & Micromfg Technol, Nanjing 210016, Peoples R China
[2] Jinhua Polytech, Mech & Elect Engn Coll, Jinhua 321000, Peoples R China
[3] Shanghai Univ Engn Sci, Res Ctr Adv Micro Nano Fabricat Mat, Sch Chem & Chem Engn, Shanghai 201620, Peoples R China
[4] Zhengzhou Abras Grinding Res Inst Co Ltd, State Key Lab High Performance Tools, Zhengzhou 450001, Peoples R China
[5] Zhejiang Univ, State Key Lab Silicon & Adv Semicond Mat, Hangzhou 310027, Peoples R China