Effect of humidification on antimony-based flexible phase change memory

Ambient humidity has an important impact on the performance of flexible electronic devices, and wearable electronic devices will inevitably involve a high humidity environment. To investigate the impact of humidification on flexible phase-change memory, we prepared Sb phase-change film and memory device unit with polyether ether ketone as substrate, and studied the effect of humidification on the properties of the film and device. The results show that the effective transition from an amorphous to a crystalline state can still be achieved by the film after soaking in water for 55 min, and the phase transition temperature increases with the increase of soaking time. Water molecules refine the film grains, resulting in increased crystalline resistance. Sb is a hydrophilic material, and its hydrophilicity decreases after crystallization. The reversible conversion of SET-RESET can be realized under different pulse widths even after the phase change memory device is soaked in water and bent many times. This study shows that antimony-based flexible phase change memory has certain deformation self-healing ability and moisture resistance, which provides a way to expand its application environment.