Advances in finishing of optical complex substrates: A comprehensive review

The growing utilization of optical components in advanced fields like high -power lasers, space optics, and aerospace has heightened the demand for superior surface quality in optical parts. This necessitates elevated surface characteristics and minimal defects, including low subsurface damage and stringent adherence to wavefront error standards. There has been a growing interest in aspherical and free-form surfaces in recent years due to their advantageous properties. This article explains the fundamental ideas and categories of ultraprecision finishing, presents typical polishing techniques, examines finishing mechanics, and finally specifies the challenges and directions for the future directions of finishing processes. This article also highlights the working principle, material removal mechanism, and the applicability of various precision processes for different materials. This review study can be a valuable and efficient resource for researchers seeking a systematic understanding of the technology. The evolution of optical parts using surface polishing technology is examined, offering valuable insights for subsequent in-depth research in optics manufacturing.