Electron-irradiation induced unconventional phase transition of fi-Ga2O3 epitaxial single-crystal thin film observed by in-situ TEM

被引：3

作者：

Zhu, Qing ^{[1
]}

Fan, Jiatong ^{[1
,2
]}

Wei, Yuxiang ^{[1
,2
]}

Wang, Zhan ^{[3
]}

Zhu, Jiejie ^{[1
]}

Sun, Jing ^{[1
,2
]}

Wang, Zhenni ^{[2
]}

Wang, Xichen ^{[1
]}

Yang, Ling ^{[1
]}

Song, Shaojie ^{[4
]}

Lei, Yimin ^{[1
,2
]}

Ma, Xiaohua ^{[1
]}

机构：

[1] Xidian Univ, State Key Lab Wide Bandgap Semicond Devices & Inte, 2 Taibai Rd, Xian 710071, Peoples R China

[2] Xidian Univ, Sch Adv Mat & Nanotechnol, 266 Xifeng Rd, Xian 710126, Peoples R China

[3] Xian Univ Posts & Telecommun, Sch Elect Engn, 618 West Changan St, Xian 710121, Peoples R China

[4] Northwestern Polytech Univ, Sch Mat Sci & Engn, 1 Dongxiang Rd, Xian 710129, Peoples R China

来源：

JOURNAL OF MATERIALS RESEARCH AND TECHNOLOGY-JMR&T | 2024年 / 30卷

基金：

中国国家自然科学基金;

关键词：

Electron irradiation; Allotropy phase transition; In-situ TEM; BALIGAS FIGURE; GALLIUM OXIDE; MERIT;

D O I：

10.1016/j.jmrt.2024.03.138

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

In this work, the phase transition process of fi-Ga2O3 thin films under heating and (or) electron irradiation condition was investigated by in-situ transmission electron microscopy. It is found that only under the high temperature, fi-Ga2O3 did not undergo phase transition even when the temperature was up to 1000 degrees C. When under electron irradiation condition, the unconventional phase transition from fi-Ga2O3 to delta-Ga2O3 occurred with a slow rate. When electron irradiation was coupled with a thermal field, the initial temperature of phase transition decreased, and the speed of phase transition also greatly accelerated. The new phase maintains crystallography relationship with the fi-Ga2O3 parent phase as following: [010]fi//[011]delta, (200)fi//(211)delta, and (402)fi//(411)delta. The results reveal that electron irradiation can trigger the phase transition process from fi-Ga2O3 to delta-Ga2O3, and the high temperature obviously accelerates the rate of phase transition process.

引用

页码：2397 / 2405

页数：9

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