Electron-irradiation induced unconventional phase transition of fi-Ga2O3 epitaxial single-crystal thin film observed by in-situ TEM

被引：2

作者：

Zhu, Qing ^{[1
]}

Fan, Jiatong ^{[1
,2
]}

Wei, Yuxiang ^{[1
,2
]}

Wang, Zhan ^{[3
]}

Zhu, Jiejie ^{[1
]}

Sun, Jing ^{[1
,2
]}

Wang, Zhenni ^{[2
]}

Wang, Xichen ^{[1
]}

Yang, Ling ^{[1
]}

Song, Shaojie ^{[4
]}

Lei, Yimin ^{[1
,2
]}

Ma, Xiaohua ^{[1
]}

机构：

[1] Xidian Univ, State Key Lab Wide Bandgap Semicond Devices & Inte, 2 Taibai Rd, Xian 710071, Peoples R China

[2] Xidian Univ, Sch Adv Mat & Nanotechnol, 266 Xifeng Rd, Xian 710126, Peoples R China

[3] Xian Univ Posts & Telecommun, Sch Elect Engn, 618 West Changan St, Xian 710121, Peoples R China

[4] Northwestern Polytech Univ, Sch Mat Sci & Engn, 1 Dongxiang Rd, Xian 710129, Peoples R China

来源：

JOURNAL OF MATERIALS RESEARCH AND TECHNOLOGY-JMR&T | 2024年 / 30卷

基金：

中国国家自然科学基金;

关键词：

Electron irradiation; Allotropy phase transition; In-situ TEM; BALIGAS FIGURE; GALLIUM OXIDE; MERIT;

D O I：

10.1016/j.jmrt.2024.03.138

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

In this work, the phase transition process of fi-Ga2O3 thin films under heating and (or) electron irradiation condition was investigated by in-situ transmission electron microscopy. It is found that only under the high temperature, fi-Ga2O3 did not undergo phase transition even when the temperature was up to 1000 degrees C. When under electron irradiation condition, the unconventional phase transition from fi-Ga2O3 to delta-Ga2O3 occurred with a slow rate. When electron irradiation was coupled with a thermal field, the initial temperature of phase transition decreased, and the speed of phase transition also greatly accelerated. The new phase maintains crystallography relationship with the fi-Ga2O3 parent phase as following: [010]fi//[011]delta, (200)fi//(211)delta, and (402)fi//(411)delta. The results reveal that electron irradiation can trigger the phase transition process from fi-Ga2O3 to delta-Ga2O3, and the high temperature obviously accelerates the rate of phase transition process.

引用

页码：2397 / 2405

页数：9

共 1 条

[1] Irradiation Induced Phase Transition of Single V2O5 Nanowire under in situ TEM Tensile Testing
Yang, Yang
Liu, Meng
Cui, Yan
Li, Tie
Wang, Yuelin
2018 IEEE 18TH INTERNATIONAL CONFERENCE ON NANOTECHNOLOGY (IEEE-NANO), 2018,

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