METAL-OXIDE-METAL CAPACITOR SIMULATION AND MODELING BY VIRTUAL FABRICATION

被引：0

作者：

Wang, Qingpeng ^{[1
]}

Zhong, Yu Jia ^{[1
]}

Deng, Quan ^{[1
]}

Lyu, Pengfei ^{[1
]}

Sun, Lifei ^{[1
]}

Chen, Yu De ^{[1
]}

Huang, Jacky ^{[1
]}

Vincent, Benjamin ^{[1
]}

Chakarov, Ivan ^{[1
]}

Ervin, Joseph ^{[1
]}

机构：

[1] Lam Res Co, Shanghai 201210, Peoples R China

来源：

CONFERENCE OF SCIENCE & TECHNOLOGY FOR INTEGRATED CIRCUITS, 2024 CSTIC | 2024年

关键词：

D O I：

10.1109/CSTIC61820.2024.10531911

中图分类号：

TP39 [计算机的应用];

学科分类号：

081203 ; 0835 ;

摘要：

In this study, a Metal-Oxide-Metal capacitor is fabricated, calibrated, and modeled in a virtual fabrication platform. The capacitance performance is evaluated using different numbers of metal layers, metal fingers, and metal to metal space through execution of a full factorial DOE. A traditional compact model and a neural network model are used to fit the simulation data, respectively. The neural network model displayed a 0.81% fitting error, which was superior to that obtained with the compact model.

引用

页数：3

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