Ultrasensitive Mechanical Sensor Using Tunable Ordered Array of Metallic and Insulating States in Vanadium Dioxide

被引:0
作者
Ma, Zecheng [1 ]
Yan, Shengnan [1 ]
Chen, Fanqiang [1 ]
Dai, Yudi [1 ]
Liu, Zenglin [1 ]
Xu, Kang [1 ]
Xu, Tao [2 ]
Tong, Zhanqin [1 ]
Chen, Moyu [1 ]
Wang, Lizheng [1 ]
Wang, Pengfei [1 ]
Sun, Litao [2 ]
Cheng, Bin [3 ]
Liang, Shi-Jun [1 ]
Miao, Feng [1 ]
机构
[1] Nanjing Univ, Inst Brain Inspired Intelligence, Collaborat Innovat Ctr Adv Microstruct, Sch Phys,Natl Lab Solid State Microstruct, Nanjing, Peoples R China
[2] Southeast Univ, SEU FEI Nano Pico Ctr, Key Lab MEMS, Minist Educ, Nanjing 210096, Peoples R China
[3] Nanjing Univ Sci & Technol, Inst Interdisciplinary Phys Sci, Sch Sci, Nanjing 210094, Peoples R China
基金
国家重点研发计划; 中国国家自然科学基金;
关键词
PHASE-TRANSITION; STRAIN; TEMPERATURE; PRESSURE;
D O I
10.1088/0256-307X/41/7/077101
中图分类号
O4 [物理学];
学科分类号
0702 ;
摘要
Detecting tiny deformations or vibrations, particularly those associated with strains below 1%, is essential in various technological applications. Traditional intrinsic materials, including metals and semiconductors, face challenges in simultaneously achieving initial metallic state and strain-induced insulating state, hindering the development of highly sensitive mechanical sensors. Here we report an ultrasensitive mechanical sensor based on a strain-induced tunable ordered array of metallic and insulating states in the single-crystal bronze-phase vanadium dioxide [VO2(B)] quantum material. It is shown that the initial metallic state in the VO2(B) flake can be tuned to the insulating state by applying a weak uniaxial tensile strain. Such a unique property gives rise to a record-high gauge factor of above 607970, surpassing previous values by an order of magnitude, with excellent linearity and mechanical resilience as well as durability. As a proof-of-concept application, we use our proposed mechanical sensor to demonstrate precise sensing of the micro piece, gentle airflows and water droplets. We attribute the superior performance of the sensor to the strain-induced continuous metal-insulator transition in the single-crystal VO2(B) flake, evidenced by experimental and simulation results. Our findings highlight the potential of exploiting correlated quantum materials for next-generation ultrasensitive flexible mechanical sensors, addressing critical limitations in traditional materials.
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页数:8
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