Bidirectional long-short term memory predictor for material removal rate in computer-controlled optical surfacing

被引:2
作者
Chen, Ke [1 ,2 ]
Xiao, Bo [1 ,2 ]
Liu, XueLian [1 ,2 ]
Wang, ChunYang [1 ,2 ]
Liang, ShuNing [1 ,3 ]
机构
[1] Xian Technol Univ, Xian Key Lab Act Photoelect Imaging Detect Technol, Xian 710021, Peoples R China
[2] Xian Technol Univ, Sch Optoelect Engn, Xian 710021, Peoples R China
[3] Changchun Univ Sci & Technol, Changchun, Peoples R China
来源
PRECISION ENGINEERING-JOURNAL OF THE INTERNATIONAL SOCIETIES FOR PRECISION ENGINEERING AND NANOTECHNOLOGY | 2024年 / 89卷
关键词
CCOS; Material removal rate; Deep learning; CNN; BiLSTM; CMP; CHEMICAL-MECHANICAL PLANARIZATION; ALGORITHM;
D O I
10.1016/j.precisioneng.2024.07.006
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
In Computer-Controlled Optical Surfacing technology, the precision of the removal function directly affects the accuracy of computer-aided processing software predictions, which in turn influences subsequent polishing machine processing. A key parameter for constructing the removal function is the material removal rate, which is often challenging to obtain accurately. Currently, the Preston equation is widely used to describe the principles of material removal. However, as a linear equation that omits many factors, it struggles to accurately model the removal function in complex machining scenarios. Therefore, this paper proposes a hybrid neural network model combining Convolutional Neural Networks and Bidirectional Long Short-Term Memory to predict the material removal rate. The model's parameters are optimized using an improved Grey Wolf Optimization algorithm, ultimately establishing a removal function closely consistent with an actual removal function. We first tested our method on the PHM2016 Data Challenge dataset, achieving a mean squared error of 6.19 and an R2 of 0.9949, outperforming other mainstream neural network prediction models developed in recent years. Additionally, we further validated the performance of the neural network using a small grinding head polishing dataset, achieving MSE and R2 values of 1.9035 and 0.99902, respectively. Finally, we applied this method to construct the removal function on an actual small grinding head production line. Compared to the traditional Preston equation-based removal function, the predicted residual surface's PV and RMS errors were reduced from 28.24 % to 35.58 %- 4.563 % and 4.86 %, respectively. These validation results demonstrate that the proposed method not only facilitates easier acquisition of the removal function model but also significantly enhances the accuracy of computer-aided processing software predictions, thereby better guiding ultra-precision machining processes.
引用
收藏
页码:473 / 491
页数:19
相关论文
共 55 条
[31]   The influence of concentration of hydroxyl radical on the chemical mechanical polishing of SiC wafer based on the Fenton reaction [J].
Lu, Jiabin ;
Chen, Run ;
Liang, Huazhuo ;
Yan, Qiusheng .
PRECISION ENGINEERING-JOURNAL OF THE INTERNATIONAL SOCIETIES FOR PRECISION ENGINEERING AND NANOTECHNOLOGY, 2018, 52 :221-226
[32]   Material removal mechanism in chemical mechanical polishing: Theory and modeling [J].
Luo, JF ;
Dornfeld, DA .
IEEE TRANSACTIONS ON SEMICONDUCTOR MANUFACTURING, 2001, 14 (02) :112-133
[33]   Modification of the Preston equation for the chemical-mechanical polishing of copper [J].
Luo, Q ;
Ramarajan, S ;
Babu, SV .
THIN SOLID FILMS, 1998, 335 (1-2) :160-167
[34]   Forecasting building energy consumption: Adaptive long-short term memory neural networks driven by genetic algorithm [J].
Luo, X. J. ;
Oyedele, Lukumon O. .
ADVANCED ENGINEERING INFORMATICS, 2021, 50
[35]  
Paulo DJ, 2017, Computational methods and production engineering Z\
[36]   Review on polishing technology of small-scale aspheric optics [J].
Peng, Yunfeng ;
Shen, Bingyi ;
Wang, Zhenzhong ;
Yang, Ping ;
Yang, Wei ;
Bi, Guo .
INTERNATIONAL JOURNAL OF ADVANCED MANUFACTURING TECHNOLOGY, 2021, 115 (04) :965-987
[37]  
Schulze C, P ASTR OPT DES MAN T
[38]   EMD-PSO-ANFIS-based hybrid approach for short-term load forecasting in microgrids [J].
Semero, Yordanos Kassa ;
Zhang, Jianhua ;
Zheng, Dehua .
IET GENERATION TRANSMISSION & DISTRIBUTION, 2020, 14 (03) :470-475
[39]   Investigation of the kinetics of tungsten chemical mechanical polishing in potassium iodate-based slurries - I. Role of alumina and potassium iodate [J].
Stein, DJ ;
Hetherington, DL ;
Cecchi, JL .
JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 1999, 146 (01) :376-381
[40]   Expected polarization properties of nonmagnetized CCOs [J].
Suleimanov, Valery F. ;
Poutanen, Juri ;
Doroshenko, Victor ;
Werner, Klaus .
ASTRONOMY & ASTROPHYSICS, 2023, 673