[1] Beijing Inst Technol, Sch Med Technol, Beijing 100081, Peoples R China
[2] Chinese Acad Sci, Shanghai Inst Microsyst & Informat Technol, State Key Lab Transducer Technol, Shanghai 200050, Peoples R China
[3] Univ Sci & Technol Beijing, Civil & Resource Engn Sch, Beijing 100083, Peoples R China
[4] Beijing Inst Technologya, Sch Mat Sci & Engn, Beijing 100081, Peoples R China