From Lab-on-chip to Lab-in-App: Challenges towards silicon photonic biosensors product developments

被引:3
|
作者
Mai, Andreas [1 ,2 ]
Mai, Christian [1 ]
Steglich, Patrick [1 ]
机构
[1] IHP Leibniz Inst Fuer Innovat Mikroelekt, Im Technologiepk 25, D-15236 Frankfurt, Germany
[2] TH Wildau, Hochschulring 1, D-15745 Wildau, Germany
来源
RESULTS IN OPTICS | 2022年 / 9卷
关键词
Silicon photonic sensors; Integrated optical sensors; Photonic integrated circuits; Optical ring resonators; Photonic biosensor; Refractive index sensing; Interchangeable sensor chip; RING-RESONATOR; WAVE-GUIDES; INTEGRATION; SENSOR; SLOT;
D O I
10.1016/j.rio.2022.100317
中图分类号
O43 [光学];
学科分类号
070207 ; 0803 ;
摘要
This work presents and evaluates different approaches of integrated optical sensors based on photonic integrated circuit (PIC) technologies for refractive index sensing. Bottlenecks in the fabrication flow towards an applicable system are discussed that hinder a cost-effective mass -production for disposable sensor chips. As sensor device, a waveguide coupled micro -ring based approach is chosen which is manufactured in an 8"wafer level process. We will show that the co -integration with a reproducible, scalable and low-cost microfluidic interface is the main challenge which needs to be overcome for future application of silicon technology based PIC sensor chips.
引用
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页数:7
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