Chalcogenides Phase Change Materials for PICs

被引：0
作者：
Xu, Kai [1 ]
Wei, Maoliang [1 ]
Lei, Kunhao [1 ]
Sun, Boshu [2 ]
Yun, Yiting [1 ]
Li, Junying [1 ]
Li, Lan [2 ]
Lin, Hongtao [1 ]
机构：
[1] Zhejiang Univ, Coll Informat Sci & Elect Engn, State Key Lab Modern Optic Instrumentat, Key Lab Micro Nano Elect & Smart Syst Zhejiang Pr, Hangzhou 310027, Zhejiang, Peoples R China
[2] Westlake Univ, Sch Engn, Key Lab Micro Nano Fabricat & Characterizat Zheji, Hangzhou 310030, Zhejiang, Peoples R China
来源：
2024 IEEE SILICON PHOTONICS CONFERENCE, SIPHOTONICS | 2024年
基金：
中国国家自然科学基金;
关键词：
zero-change" platform; heterogeneous integration; nonvolatile phase change materials;
D O I：
10.1109/SiPhotonics60897.2024.10543829
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
A "zero-change" platform for monolithic back-end-of-line integration of phase-change materials (PCM) in silicon photonics was proposed and high performance nonvolatile PCM/Si heterogeneous integrated devices based on Sb2Se3 and Ge2Sb2Se4Te1 were demonstrated.
引用
收藏
页数：2
相关论文
共 5 条
  • [1] Magnetron-sputtered and thermal-evaporated low-loss Sb-Se phase-change films in non-volatile integrated photonics
    Lei, Kunhao
    Wei, Maoliang
    Chen, Zequn
    Wu, Jianghong
    Jian, Jialing
    Du, Jia
    Li, Junying
    Li, Lan
    Lin, Hongtao
    [J]. OPTICAL MATERIALS EXPRESS, 2022, 12 (07): : 2815 - 2823
  • [2] Integrated Bragg grating filters based on silicon-Sb2Se3 with non-volatile bandgap engineering capability
    Sun, Boshu
    Wei, Maoliang
    Lei, Kunhao
    Chen, Zequn
    Sun, Chunlei
    Li, Junying
    Li, Lan
    Lin, Hongtao
    [J]. OPTICS EXPRESS, 2023, 31 (17): : 27905 - 27913
  • [3] Wei M., Zero change"platform for monolithic back-end-of-line integration of phase change materials in silicon photonics
  • [4] Wei M., Inverse design of compact nonvolatile reconfigurable silicon photonic devices with phase-change materials
  • [5] Electrically programmable phase-change photonic memory for optical neural networks with nanoseconds in situ training capability
    Wei, Maoliang
    Li, Junying
    Chen, Zequn
    Tang, Bo
    Jia, Zhiqi
    Zhang, Peng
    Lei, Kunhao
    Xu, Kai
    Wu, Jianghong
    Zhong, Chuyu
    Ma, Hui
    Ye, Yuting
    Jian, Jialing
    Sun, Chunlei
    Liu, Ruonan
    Sun, Ying
    Sha, Wei. E. I.
    Hu, Xiaoyong
    Yang, Jianyi
    Li, Lan
    Lin, Hongtao
    [J]. ADVANCED PHOTONICS, 2023, 5 (04):
1