Electromigration-Induced Evolution of Micromorphology and Electrical Properties in Gold Nanowires: Implications for Nanoelectronics

被引:0
|
作者
Yu, Dacheng [1 ]
Tian, Zhongzheng [1 ]
Li, Muchan [1 ]
Yu, Xuemin [1 ]
Ren, Zhongyang [1 ]
Ren, Liming [1 ]
Fu, Yunyi [1 ]
机构
[1] Peking Univ, Sch Integrated Circuits, Beijing 100871, Peoples R China
关键词
metal nanowires; electromigration; AFM; void; hillock and nanogap; FAILURE MECHANISMS; STRESS; FABRICATION; GENERATION; RESISTANCE; ROUGHNESS; FILMS;
D O I
10.1021/acsanm.4c00189
中图分类号
TB3 [工程材料学];
学科分类号
0805 ; 080502 ;
摘要
In this investigation, atomic force microscopy (AFM) was employed to meticulously examine the electromigration phenomena occurring in pure gold nanowires possessing a mere 10 nm thickness. The study elucidates the dynamic evolution of the micromorphology of gold nanowires during the electromigration process, providing insights into the intricate processes leading to the formation of voids, hillocks, and nano gaps. Significantly, the intricate relationship between these morphological changes and the consequential impact on electrical properties, particularly the resistance of the nanowires, is systematically unveiled. A qualitative analysis of the formation mechanisms behind voids and hillocks was conducted, contributing to a deeper understanding of the electromigration-induced phenomena. This study holds significance in controlling the width and position of metal nanogaps, offering promising avenues for the advancement of gap-based nanoelectronic and memory devices.
引用
收藏
页码:14906 / 14920
页数:15
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