Advancements and challenges in strained group-IV-based optoelectronic materials stressed by ion beam treatment

被引:0
作者
Masteghin, Mateus G. [1 ]
Murdin, Benedict N. [1 ]
Duffy, Dominic A. [1 ,2 ,3 ]
Clowes, Steven K. [1 ]
Cox, David C. [1 ]
Sweeney, Stephen J. [1 ,2 ,3 ]
Webb, Roger P. [4 ]
机构
[1] Univ Surrey, Adv Technol Inst, Guildford GU2 7XH, Surrey, England
[2] Univ Glasgow, James Watt Sch Engn, Glasgow City G12 8LT, Scotland
[3] ZiNIR Ltd, Eastbourne, East Sussex, England
[4] Univ Surrey, Ion Beam Ctr, Guildford GU2 7XH, Surrey, England
基金
英国工程与自然科学研究理事会;
关键词
ion implantation; tensile strain; direct bandgap semiconductors; quantum technology; MOORES LAW; TEMPERATURE-DEPENDENCE; RAMAN-SCATTERING; UNIAXIAL-STRESS; SILICON; SI; GE; DEFORMATION; HETEROSTRUCTURES; SPECTROSCOPY;
D O I
10.1088/1361-648X/ad649f
中图分类号
O469 [凝聚态物理学];
学科分类号
070205 ;
摘要
In this perspective article, we discuss the application of ion implantation to manipulate strain (by either neutralizing or inducing compressive or tensile states) in suspended thin films. Emphasizing the pressing need for a high-mobility silicon-compatible transistor or a direct bandgap group-IV semiconductor that is compatible with complementary metal-oxide-semiconductor technology, we underscore the distinctive features of different methods of ion beam-induced alteration of material morphology. The article examines the precautions needed during experimental procedures and data analysis and explores routes for potential scalable adoption by the semiconductor industry. Finally, we briefly discuss how this highly controllable strain-inducing technique can facilitate enhanced manipulation of impurity-based spin quantum bits (qubits).
引用
收藏
页数:16
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