Mems capacitive humidity sensors based on different structures for low humidity applications

被引：0
作者：
Chen, Long [1 ]
Huang, Jianqiu [1 ]
机构：
[1] Southeast Univ, Key Lab MEMS, Minist Educ, Nanjing, Peoples R China
来源：
25TH ANNUAL CONFERENCE & 14TH INTERNATIONAL CONFERENCE OF THE CHINESE SOCIETY OF MICRO-NANO TECHNOLOGY, CSMNT 2023 | 2024年 / 2740卷
关键词：
D O I：
10.1088/1742-6596/2740/1/012019
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
引用
收藏
页数：3
相关论文
共 5 条
  • [1] Fiber optic humidity sensors for high-energy physics applications at CERN
    Consales, M.
    Buosciolo, A.
    Cutolo, A.
    Breglio, G.
    Irace, A.
    Buontempo, S.
    Petagna, P.
    Giordano, M.
    Cusano, A.
    [J]. SENSORS AND ACTUATORS B-CHEMICAL, 2011, 159 (01): : 66 - 74
  • [2] Capacitance sensor for nondestructive measurement of moisture content in nuts and grain
    Kandala, Chari V. K.
    Butts, Chris L.
    Nelson, Stuart O.
    [J]. IEEE TRANSACTIONS ON INSTRUMENTATION AND MEASUREMENT, 2007, 56 (05) : 1809 - 1813
  • [3] Trace moisture measurement in natural gas mixtures with a single calibration for nitrogen background gas
    Takeda, N.
    Carroll, P.
    Tsukahara, Y.
    Beardmore, S.
    Bell, S.
    Yamanaka, K.
    Akao, S.
    [J]. MEASUREMENT SCIENCE AND TECHNOLOGY, 2020, 31 (10)
  • [4] A Linear Capacitive Sensor for ppm Moisture Measurement in SF6 Gas-Insulated Switchgear
    Zargar, Zubair Hassan
    Akram, Kazi Jabed
    Biswal, Gyan Ranjan
    Islam, Tarikul
    [J]. IEEE TRANSACTIONS ON INSTRUMENTATION AND MEASUREMENT, 2021, 70
  • [5] A Thin Film Porous Alumina-Based Cross-Capacitive Humidity Sensor
    Zargar, Zubair Hassan
    Islam, Tarikul
    [J]. IEEE TRANSACTIONS ON INSTRUMENTATION AND MEASUREMENT, 2020, 69 (05) : 2269 - 2276
1