Influence of substrate surface roughness on the adhesion of magnetron sputtered Cr coating

被引：3
作者：
Liu, Wenxin [1 ,2 ]
Wang, Chuanbin [1 ,2 ]
Liu, Long [1 ,2 ]
Peng, Jian [1 ,2 ]
Li, Wenjun [3 ]
Shen, Qiang [2 ]
Xu, Zhigang [1 ,2 ]
机构：
[1] Chaozhou Branch, Chem & Chem Engn Guangdong Lab, Chaozhou 521000, Guangdong, Peoples R China
[2] Wuhan Univ Technol, State Key Lab Adv Technol Mat Synth & Proc, Wuhan 430070, Peoples R China
[3] Qingdao Kairui Elect Co Ltd, Qingdao 266000, Peoples R China
来源：
INTERNATIONAL JOURNAL OF MODERN PHYSICS B | 2025年 / 39卷 / 09期
基金：
国家重点研发计划;
关键词：
DC magnetron sputtering; Cr coating; surface roughness; adhesion strength; MECHANICAL-PROPERTIES;
D O I：
10.1142/S0217979225400387
中图分类号：
O59 [应用物理学];
学科分类号：
摘要：
Cr coatings were deposited on both the polished and rough substrate using DC magnetron sputtering. The influence of substrate surface roughness on the morphology, crystalline phase and mechanical properties of the coatings were analyzed. The results showed that surface roughness had a significant effect on the surface morphology of the coating, as the coating inherited the surface morphology of the substrate. Surface roughness before and after coating for the polished and rough surfaces were 0.054-0.046 and 0.107-0.563 mu m, respectively. The hardness and Young's modulus of the coating deposited on the polished surface were 5.5 and 188.6GPa, respectively, while the mechanical properties of the coating deposited on the rough surface are about the same. The results showed that the adhesion of the coating can be improved by appropriately increasing the surface roughness.
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页数：7
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共 11 条
[1]   Impact Resistance and Properties of (Cr,Al,Si)N Coatings Deposited by Gas Flow Sputtering with Pulsed DC Supply [J].
Bobzin, Kirsten ;
Kalscheuer, Christian ;
Hassanzadegan Aghdam, Parisa .
ADVANCED ENGINEERING MATERIALS, 2022, 24 (04)
[2]   A comparison of the galling wear behaviour of PVD Cr and electroplated hard Cr thin films [J].
Daure, J. L. ;
Carrington, M. J. ;
Shipway, P. H. ;
McCartney, D. G. ;
Stewart, D. A. .
SURFACE & COATINGS TECHNOLOGY, 2018, 350 :40-47
[3]   Influence of substrate roughness on structure and mechanical property of TiAlN coating fabricated by cathodic arc evaporation [J].
Huang, Ruo-xuan ;
Qi, Zheng-bing ;
Sun, Peng ;
Wang, Zhou-cheng ;
Wu, Chong-hu .
PROCEEDING OF THE FOURTH INTERNATIONAL CONFERENCE ON SURFACE AND INTERFACE SCIENCE AND ENGINEERING, 2011, 18
[4]   Effects of sputtering power on mechanical properties of Cr films deposited by magnetron sputtering [J].
Kim, K. ;
Park, M. ;
Lee, W. ;
Kim, H. W. ;
Lee, J. G. ;
Lee, C. .
MATERIALS SCIENCE AND TECHNOLOGY, 2008, 24 (07) :838-842
[5]   Influence of substrate roughness on adhesion of TiN coatings [J].
Miletic, Aleksandar ;
Terek, Pal ;
Kovacevic, Lazar ;
Vilotic, Marko ;
Kakas, Damir ;
Skoric, Branko ;
Kukuruzovic, Dragan .
JOURNAL OF THE BRAZILIAN SOCIETY OF MECHANICAL SCIENCES AND ENGINEERING, 2014, 36 (02) :293-299
[6]   Deposition and characterisation of multilayered PVD TiN/CrN coatings on cemented carbide [J].
Nordin, M ;
Larsson, M .
SURFACE & COATINGS TECHNOLOGY, 1999, 116 :108-115
[7]   Relationship of microstructure, mechanical properties and titanium cutting performance of TiAlN/TiAlSiN composite coated tool [J].
Sui, Xudong ;
Li, Guojian ;
Qin, Xuesi ;
Yu, Haidong ;
Zhou, Xiangkui ;
Wang, Kai ;
Wang, Qiang .
CERAMICS INTERNATIONAL, 2016, 42 (06) :7524-7532
[8]   The VDI 3198 indentation test evaluation of a reliable qualitative control for layered compounds [J].
Vidakis, N ;
Antoniadis, A ;
Bilalis, N .
JOURNAL OF MATERIALS PROCESSING TECHNOLOGY, 2003, 143 :481-485
[9]   Effect of substrate pretreatments on the structure and properties of AlTiN coatings deposited on TiCN-based cermets [J].
Xian, Guang ;
Xiong, Ji ;
Fan, Hongyuan ;
Guo, Zhixing ;
Xian, Lijun ;
Sun, Lan ;
Zhao, Haibo .
THIN SOLID FILMS, 2023, 770
[10]   Tribological properties, oxidation resistance and turning performance of AlTiN/AlCrSiN multilayer coatings by arc ion plating [J].
Zhang, Quan ;
Xu, Yuxiang ;
Zhang, Tengfei ;
Wu, Zhengtao ;
Wang, Qimin .
SURFACE & COATINGS TECHNOLOGY, 2018, 356 :1-10
12