[1] Xiamen Univ Technol, Sch Mech & Automot Engn, Xiamen 361024, Peoples R China
[2] Xiamen Univ Technol, Sch Optoelect & Commun Engn, Xiamen 361024, Peoples R China
[3] Xiamen Univ, Pen Tung Sah Inst Micro Nano Sci & Technol, Xiamen 361102, Peoples R China
[4] Lab Precis Actuat & Transmiss Fujian Prov Univ, Xiamen 361024, Peoples R China