THE EFFECT OF MEMBRANE LOAD ON THE USAGE OF BERGER'S MODEL IN ELECTROSTATICALLY ACTUATED PRE-STRESSED CIRCULAR CURVED MICRO PLATES

被引:0
作者
Medina, Lior [1 ]
Eliasi, Rami [2 ]
Gilat, Rivka [3 ]
Krylov, Slava [2 ]
机构
[1] Univ Cambridge, Dept Engn, Nanosci Ctr, Cambridge CB3 0FF, England
[2] Tel Aviv Univ, Fac Engn, Sch Mech Engn, IL-69978 Ramat Aviv, Israel
[3] Ariel Univ, Fac Engn, Dept Civil Engn, IL-44837 Ariel, Israel
来源
PROCEEDINGS OF ASME 2021 INTERNATIONAL DESIGN ENGINEERING TECHNICAL CONFERENCES AND COMPUTERS AND INFORMATION IN ENGINEERING CONFERENCE, IDETC-CIE2021, VOL 11 | 2021年
基金
以色列科学基金会;
关键词
REDUCED-ORDER MODELS; PULL-IN INSTABILITY; SNAP-THROUGH; DYNAMIC-BEHAVIOR; BISTABILITY; MEMS; SYSTEM; SHELL;
D O I
暂无
中图分类号
TP39 [计算机的应用];
学科分类号
081203 ; 0835 ;
摘要
The effect of membrane load on the behaviour of axisymmetric bistable circular curved microplates on Berger's based axisymmetric reduced order (RO) model, incorporating radial prestress, is studied. The model is first validated for a "mechanical" load, against a Foppl-von-Karman's RO model with twenty degrees of freedom (DOF), a finite differences (FD) solution and a finite elements (FE) model, serving as the reference. All solutions implement the "Riks" method to track possible unstable branches, which can swerve in due to the presence of higher buckling modes. A convergence study is carried out for the snap-through location and load, as well as for the critical elevation and prestress required for bistability. Based on validated results of the analysis, the reliability of the model for predicting the effect of prestress on the plate behaviour under nonlinear electrostatic load is then investigated while using FD solutions as the reference. The study furnishes a reliable expended RO model, which includes prestress on the as-fabricated curved plate. The resulting model can further be used to estimate the value of residual prestress, present in an electrostatically actuated curved plate, based on its response.
引用
收藏
页数:10
相关论文
共 53 条
[1]   A novel snap-through buckling behaviour of axisymmetric shallow shells with possible application in transducer design [J].
Akkas, N ;
Odeh, G .
COMPUTERS & STRUCTURES, 2001, 79 (29-30) :2579-2585
[2]  
Aksyuk V. A., 2002, SOLI STAT SENS ACT M, P1
[3]   Statics and Dynamics of MEMS Arches Under Axial Forces [J].
Alkharabsheh, Sami A. ;
Younis, Mohammad I. .
JOURNAL OF VIBRATION AND ACOUSTICS-TRANSACTIONS OF THE ASME, 2013, 135 (02)
[4]   Bistable Micro Caps Fabricated by Sheet Metal Forming [J].
Asher, A. ;
Benjamin, E. ;
Medina, L. ;
Gilat, R. ;
Krylov, S. .
JOURNAL OF MICROMECHANICS AND MICROENGINEERING, 2020, 30 (06)
[5]   Bi-stability of pressurized electrically actuated flat micro-plates [J].
Askari, Amir R. .
INTERNATIONAL JOURNAL OF SOLIDS AND STRUCTURES, 2019, 178 :167-179
[6]   Reduced-order models for microelectromechanical rectangular and circular plates incorporating the Casimir force [J].
Batra, R. C. ;
Porfiri, M. ;
Spinello, D. .
INTERNATIONAL JOURNAL OF SOLIDS AND STRUCTURES, 2008, 45 (11-12) :3558-3583
[7]   Effects of van der Waals force and thermal stresses on pull-in instability of clamped rectangular microplates [J].
Batra, Romesh C. ;
Porfiri, Maurizio ;
Spinello, Davide .
SENSORS, 2008, 8 (02) :1048-1069
[8]   A Technique for Estimation of Residual Stress and Young's Modulus of Compressively Stressed Thin Films Using Microfabricated Beams [J].
Behera, Amruta Ranjan ;
Shaik, Habibuddin ;
Rao, G. Mohan ;
Pratap, Rudra .
JOURNAL OF MICROELECTROMECHANICAL SYSTEMS, 2019, 28 (06) :1039-1054
[9]  
Berger H. M., 1954, PhD thesis
[10]  
Bonet J., 1997, NONLINEAR CONTINUUM