Evaluation of Imprint and Multi-Level Dynamics in Ferroelectric Capacitors

被引:3
|
作者
Vecchi, Sara [1 ]
Puglisi, Francesco Maria [2 ]
Appelt, Pascal [3 ]
Guido, Roberto [3 ]
Wang, Xuetao [3 ]
Slesazeck, Stefan [3 ]
Mikolajick, Thomas [3 ,4 ]
Lancaster, Suzanne [3 ]
机构
[1] MDLO Italy, Appl Mat, Via M Ruini 74-L, I-42124 Reggio Emilia, RE, Italy
[2] Univ Modena & Reggio Emilia, Dipartimento Ingn Enzo Ferrari, Via P Vivarelli 10-1, I-41125 Modena, MO, Italy
[3] NaMLab gGmbH, Nothnitzer Str, D-01187 Dresden, Germany
[4] Tech Univ Dresden, Chair Nanoelect, Nothnitzer Str, D-01187 Dresden, Germany
来源
ADVANCED ELECTRONIC MATERIALS | 2025年 / 11卷 / 02期
关键词
charge injection; domain pinning; ferroelectric hafnia; imprint; multi-level switching; MECHANISMS;
D O I
10.1002/aelm.202400204
中图分类号
TB3 [工程材料学];
学科分类号
0805 ; 080502 ;
摘要
Fluorite-structured ferroelectrics are one of the most promising material systems for emerging memory technologies. However, when integrated into electronic devices, these materials exhibit strong imprint effects that can lead to a failure during writing or retention operations. To improve the performance and reliability of these devices, it is cardinal to understand the physical mechanisms underlying the imprint during operation. In this work, the comparison of First-Order Reversal Curves measurements with a new gradual switching experimental approach named "Unipolar Reversal Curves" is used to analyze both the fluid imprint and the time-dependent imprint effects within a 10 nm-thick Hf0.5Zr0.5O2 capacitor. Interestingly, the application of delay times (ranging from 100 mu s up to 10 s) between the partial switching pulses of a Unipolar Reversal Curve sequence enables analysis of the connection between the two aforementioned imprint types. Based on these results, the study finally reports a unified physical interpretation of imprint in the context of a charge injection model, which explains both types of imprint and sheds light on the dynamics of multi-level polarization switching in ferroelectrics. Multi-level ferroelectric switching depends strongly on pulse timings. A hysteresis shift along the voltage axis ("imprint") occurs when a ferroelectric device is left in a particular state. Here, different pulse sequences are adopted to investigate and explain the contrasting effects of fluid (short time scales) and time-dependent imprint (long time scales) on multi-level switching in Hf0.5Zr0.5O2 capacitors. image
引用
收藏
页数:10
相关论文
共 50 条
  • [1] Imprint in ferroelectric capacitors
    Warren, WL
    Tuttle, BA
    Dimos, D
    Pike, GE
    AlShareef, HN
    Ramesh, R
    Evans, JT
    JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS, 1996, 35 (2B): : 1521 - 1524
  • [2] Imprint in ferroelectric capacitors
    Sandi Natl Lab, Albuquerque, United States
    Jpn J Appl Phys Part 1 Regul Pap Short Note Rev Pap, 2 B (1521-1524):
  • [3] Oxygen-Atom Incorporated Ferroelectric AlScN Capacitors for Multi-Level Operation
    Chen, Si-Meng
    Nishida, Hirofumi
    Tsai, Sung-Lin
    Hoshii, Takuya
    Tsutsui, Kazuo
    Wakabayashi, Hitoshi
    Chang, Edward Yi
    Kakushima, Kuniyuki
    IEEE ELECTRON DEVICE LETTERS, 2024, 45 (11) : 2090 - 2093
  • [4] Imprint mechanism in ferroelectric capacitors
    Evans, JT
    Cardoza, HE
    INTEGRATED FERROELECTRICS, 1995, 10 (1-4) : 267 - 277
  • [6] VOLTAGE SHIFTS AND IMPRINT IN FERROELECTRIC CAPACITORS
    WARREN, WL
    DIMOS, D
    PIKE, GE
    TUTTLE, BA
    RAYMOND, MV
    RAMESH, R
    EVANS, JT
    APPLIED PHYSICS LETTERS, 1995, 67 (06) : 866 - 868
  • [7] Unravelling and controlling hidden imprint fields in ferroelectric capacitors
    Liu, Fanmao
    Fina, Ignasi
    Bertacco, Riccardo
    Fontcuberta, Josep
    SCIENTIFIC REPORTS, 2016, 6
  • [8] Unravelling and controlling hidden imprint fields in ferroelectric capacitors
    Fanmao Liu
    Ignasi Fina
    Riccardo Bertacco
    Josep Fontcuberta
    Scientific Reports, 6
  • [9] Spatial inhomogeneity of imprint and switching behavior in ferroelectric capacitors
    Gruverman, A
    Rodriguez, BJ
    Kingon, AI
    Nemanich, RJ
    Cross, JS
    Tsukada, M
    APPLIED PHYSICS LETTERS, 2003, 82 (18) : 3071 - 3073
  • [10] EVALUATION IN A MULTI-LEVEL AGENCY
    KRESH, E
    JOURNAL OF RESEARCH AND DEVELOPMENT IN EDUCATION, 1970, 3 (04): : 97 - 102