A New Fully Differential CMOS Capacitance to Digital Converter for Lab-on-Chip Applications

被引:19
作者
Nabovati, Ghazal [1 ]
Ghafar-Zadeh, Ebrahim [2 ]
Mirzaei, Maryam [1 ]
Ayala-Charca, Giancarlo [1 ]
Awwad, Falah [3 ]
Sawan, Mohamad [1 ]
机构
[1] Polytech Montreal, Polystim Neurotechnol Lab, Dept Elect Engn, Montreal, PQ H3T 1J4, Canada
[2] York Univ, Elect Engn & Comp Sci Dept, Toronto, ON M3J 1P3, Canada
[3] United Arab Emirates Univ, Abu Dhabi 00000, U Arab Emirates
基金
加拿大自然科学与工程研究理事会; 新加坡国家研究基金会;
关键词
Capacitive sensor; chemical sensor; CMOS; lab-on-chip; Sigma Delta modulator; SENSOR ARRAY;
D O I
10.1109/TBCAS.2014.2336596
中图分类号
R318 [生物医学工程];
学科分类号
0831 ;
摘要
In this paper, we present a new differential CMOS capacitive sensor for Lab-on-Chip applications. The proposed integrated sensor features a DC-input Sigma Delta capacitance to digital converter (CDC) and two reference and sensing microelectrodes integrated on the top most metal layer in 0.35 mu m CMOS process. Herein, we describe a readout circuitry with a programmable clocking strategy using a Charge Based Capacitance Measurement technique. The simulation and experimental results demonstrate a high capacitive dynamic range of 100 fF-110 fF, the sensitivity of 350 mV/ fF and the minimum detectable capacitance variation of as low as 10 aF. We also demonstrate and discuss the use of this device for environmental applications through various chemical solvents.
引用
收藏
页码:353 / 361
页数:9
相关论文
共 15 条
[1]   Si-based sensor for virus detection [J].
Balasubramanian, A ;
Bhuva, B ;
Mernaugh, R ;
Haselton, FR .
IEEE SENSORS JOURNAL, 2005, 5 (03) :340-344
[2]   Microelectronic capacitance transducer for particle detection [J].
Evans, I ;
York, T .
IEEE SENSORS JOURNAL, 2004, 4 (03) :364-372
[3]   INTEGRATED ARRAY SENSOR FOR DETECTING ORGANIC-SOLVENTS [J].
GARDNER, JW ;
PIKE, A ;
DEROOIJ, NF ;
KOUDELKAHEP, M ;
CLERC, PA ;
HIERLEMANN, A ;
GOPEL, W .
SENSORS AND ACTUATORS B-CHEMICAL, 1995, 26 (1-3) :135-139
[4]   Handheld impedance biosensor system using engineered proteinaceous receptors [J].
Ghafar-Zadeh, Ebrahim ;
Chowdhury, Shafinaz F. ;
Aliakbar, Amir ;
Chodavarapu, Vamsy ;
Lambrose, Rosemond ;
Beital, Lenord ;
Sawan, Mohamad ;
Trifiro, Mark .
BIOMEDICAL MICRODEVICES, 2010, 12 (06) :967-975
[5]   Bacteria Growth Monitoring Through a Differential CMOS Capacitive Sensor [J].
Ghafar-Zadeh, Ebrahim ;
Sawan, Mohamad ;
Chodavarapu, Vamsy P. ;
Hosseini-Nia, Tahereh .
IEEE TRANSACTIONS ON BIOMEDICAL CIRCUITS AND SYSTEMS, 2010, 4 (04) :232-238
[6]   A Hybrid Microfluidic/CMOS Capacitive Sensor Dedicated to Lab-on-Chip Applications [J].
Ghafar-Zadeh, Ebrahim ;
Sawan, Mohamad .
IEEE TRANSACTIONS ON BIOMEDICAL CIRCUITS AND SYSTEMS, 2007, 1 (04) :270-277
[7]   Charge-based capacitive sensor array for CMOS-based laboratory-on-chip applications [J].
Ghafar-Zadeh, Ebrahirn ;
Sawan, Mohamad .
IEEE SENSORS JOURNAL, 2008, 8 (3-4) :325-332
[8]   Smart single-chip gas sensor microsystem [J].
Hagleitner, C ;
Hierlemann, A ;
Lange, D ;
Kummer, A ;
Kerness, N ;
Brand, O ;
Baltes, H .
NATURE, 2001, 414 (6861) :293-296
[9]  
Kang-Ho Lee, 2012, 2012 IEEE International Solid-State Circuits Conference (ISSCC), P120, DOI 10.1109/ISSCC.2012.6176945
[10]   Chemicapacitive microsensors for chemical warfare agent and toxic industrial chemical detection [J].
Mlsna, TE ;
Cemalovic, S ;
Warburton, M ;
Hobson, ST ;
Mlsna, DA ;
Patel, SV .
SENSORS AND ACTUATORS B-CHEMICAL, 2006, 116 (1-2) :192-201