[1] Chinese Acad Sci, Inst Semicond, Beijing 100083, Peoples R China
[2] Univ Acad Sci, Coll Mat Sci & Optoelect Technol, Beijing 100049, Peoples R China
[3] Beijing Univ Posts & Telecommun, State Key Lab Informat Photon & Opt Commun, Beijing 100876, Peoples R China
[4] BUPT HTGD Joint Lab Quantum Optoelect & Bivergentu, Beijing 100876, Peoples R China