A centipede-inspired bonded-type ultrasonic actuator with high thrust force density driven by dual-torsional-vibration-induced flexural traveling waves

This paper presents an ultrasonic actuator with high thrust force density driven by dual-torsional-vibrationinduced flexural traveling waves. Here, the PZT plates are bonded onto a duralumin vibrating body in a block shape to accomplish a compact configuration and they operate in the 2nd torsional vibrations, whose strong electromechanical coupling effect facilitates the enhancement of the driving force. Interestingly, the operating principle somewhat imitates the movement pattern of the centipede's feet. To test the validity, first, by using a Mason-equivalent-circuit-based dynamic model, several key dimensions were tuned to increase the driving-forceto-weight ratio. Meanwhile, the driving feet's configurations are adjusted based on a kinetic model to make the elliptical motion shape close to a circle. Then, an actuator prototype with the size of 48 x 47 x 6 mm3 and the weight of 29 g was fabricated and the moving/loading/positioning performance was evaluated. When the actuator adopts a continuous operation, its maximal sliding speed reached 630 mm/s at the frequency of 24.95 kHz. Moreover, it yielded the maximal thrust force and the maximal output power of 4.38 N and 527.8 mW, corresponding to the thrust force density and the power density of 151.2 N/kg and 18.2 W/kg, respectively. In a stepping operation, the minimal step displacement was 0.91 mu m. These results demonstrate that the dual-torsional-vibrations-induced traveling wave allows the actuator to produce the high thrust force density and provides a new actuating principle to design powerful ultrasonic actuators.