Scanning Microwave Microscopy Subsurface Detection of Magneto-impedance Effect in Thin Film Permalloy

被引：0

作者：

Fabi, Gianluca ^{[1
]}

Sparey, Maxwell ^{[1
]}

Leitner, Michael ^{[1
]}

Silvestri, Antonia ^{[1
]}

Alic, Ivan ^{[1
]}

Ney, Verena ^{[2
]}

Ney, Andreas ^{[2
]}

Farina, Marco ^{[3
]}

Gramse, Georg ^{[1
]}

机构：

[1] Johannes Kepler Univ Linz, Inst Biophys, Linz, Austria

[2] Johannes Kepler Univ Linz, Inst Semicond & Solid State Phys, Linz, Austria

[3] Univ Politecn Marche, Dept Informat Engn, Ancona, Italy

来源：

2024 IEEE/MTT-S INTERNATIONAL MICROWAVE SYMPOSIUM, IMS 2024 | 2024年

关键词：

Scanning Microwave Microscopy; Magnetic Thin Films; Permalloy; PERMEABILITY;

D O I：

10.1109/IMS40175.2024.10600422

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

Permalloy-based thin films are ferromagnetic materials with excellent magnetic properties, and their detection is appealing for several applications. Here, a Scanning Microwave Microscope is used to characterize a 15 nm film permalloy (Py) layer buried below 5 nm Aluminum (Al). An ad-hoc experimental setup for reduced parasitics and high-sensitivity operation proved to be an excellent platform to probe the sample magnetic response with nanometer spatial resolution. In particular, magnetoimpedance effects, i.e. the high-frequency electrical impedance change due to an externally applied magnetic field, have been captured at 11.1 GHz by microwave spectroscopy, and subsequently studied for various magnetic field intensities. The achieved combination of microwave tomography, high-resolution imaging, and magnetic response detection is challenging for other characterization tools; this provides the foundation to characterize modern multilayered and nanostructured magnetic devices with this tool.

引用

页码：990 / 993

页数：4

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