共 50 条
[44]
Multiple charge ion beam generation with a 2.45 GHz electron cyclotron resonance ion source
[J].
Science China Physics, Mechanics & Astronomy,
2017, 60
[45]
Development of a 2.45 GHz electron cyclotron resonance ion source for ion-implanter application
[J].
Review of Scientific Instruments,
1998, 69 (2 pt 2)