Two-dimensional molecular crystal Sb2O3 for electronics and optoelectronics

被引:4
作者
Yu, Jing [1 ,2 ,3 ,4 ]
Han, Wei [2 ,5 ]
Ong, Ruey Jinq [1 ]
Shi, Jing-Wen [6 ]
Suleiman, Abdulsalam Aji [7 ]
Liu, Kailang [8 ]
Ling, Francis Chi-Chung [1 ]
机构
[1] Univ Hong Kong, Dept Phys, Hong Kong 999077, Peoples R China
[2] Hubei Yangtze Memory Labs, Wuhan 430205, Hubei, Peoples R China
[3] Univ Manchester, Dept Phys & Astron, Manchester M13 9PL, England
[4] Univ Manchester, Natl Graphene Inst, Manchester M13 9PL, England
[5] Hubei Univ, Inst Microelect & Integrated Circuits, Sch Microelect, Wuhan 430062, Peoples R China
[6] South China Normal Univ, Sch Chem, Guangzhou 510006, Peoples R China
[7] Bilkent Univ UNAM, Inst Mat Sci & Nanotechnol, TR-06800 Ankara, Turkiye
[8] Huazhong Univ Sci & Technol, Sch Mat Sci & Engn, State Key Lab Mat Proc & Die & Mould Technol, Wuhan, Peoples R China
基金
中国国家自然科学基金;
关键词
THIN-FILMS; PERFORMANCE; 2D; ULTRATHIN; ANTIMONY; MEMORY; HETEROSTRUCTURES; NANOPARTICLES; FABRICATION; TRANSITION;
D O I
10.1063/5.0205749
中图分类号
O59 [应用物理学];
学科分类号
摘要
As a two-dimensional (2D) inorganic molecular van der Waals crystal, Sb2O3 has been widely recognized as an excellent dielectric and encapsulation material due to its wide bandgap, high dielectric constant (kappa), and remarkably high air stability. Considering the significance and potential application of Sb2O3 in future electronic devices, it is valuable to summarize its recent advancements. In this review, we present the latest progress on 2D Sb2O3 flakes and films, encompassing synthesis methods, physical properties, and device applications. First, preparation strategies such as chemical vapor deposition, vertical physical vapor deposition, thermal evaporation deposition, liquid metal synthesis, and atomic layer deposition growth routes are highlighted. Subsequently, the mechanical properties and the phase transition mechanisms of 2D Sb2O3 are presented. Moreover, device applications, including encapsulation layer, photodetector, and gate dielectric, are demonstrated. Finally, we outline the future challenges and research priorities of 2D Sb2O3 materials.
引用
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页数:21
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