共 26 条
[5]
Jianjun Y., 2004, Laser Optron. Prog, V41, P39
[6]
Lebeau J., 2015, Bulk Laser Material Modification: Towards a Kerfless Laser Wafering Process
[7]
Comparison of ns and ps pulses for Si and glass micromachining applications
[J].
SOLID STATE LASERS XVIII: TECHNOLOGY AND DEVICES,
2009, 7193