Design and optimization of diamond mid-infrared phase shifter

被引:5
作者
Chen, Chengke [1 ]
He, Zhi [1 ]
Xu, Ancha [1 ]
Li, Xiao [1 ]
Jiang, Meiyan [1 ]
Xu, Tao [2 ]
Yan, Bo [2 ]
Hu, Xiaojun [1 ]
机构
[1] Zhejiang Univ Technol, Coll Chem Engn & Mat Sci, Hangzhou, Peoples R China
[2] Zhejiang Univ Technol, Dept Appl Phys, Hangzhou, Peoples R China
来源
FUNCTIONAL DIAMOND | 2022年 / 1卷 / 01期
关键词
Mid-infrared; ridge waveguide; diamond; phase shifter; refractive index; WAVE-GUIDES; POLYCRYSTALLINE DIAMOND; PLASMA DISPERSION; SILICON; MODULATION;
D O I
10.1080/26941112.2020.1869485
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
Herein, the mid-infrared (7.7-13.7 mu m) diamond-based phase shifter was designed and optimized by finite-element analysis. The ridge-shaped diamond waveguide is designed and doped to form the internal p-n structure, and the internal carrier distribution is changed by applying forward and reverse voltages to change the effective refractive index to achieve the effect of pi-phase shift. The results show that when p-doping concentration is 4 x 1017 cm-3 and n doping concentration is 1 x 1018 cm-3, upon the reverse voltage (8 V) is applied, the change of the real part of effective refractive index (Delta R) is 1.6 x 10-5, and the length of the phase shifter (L) required to realize the pi-phase shift is 241 mm; upon the forward voltage (-8 V) is applied, Delta R increases to 3.2 x 10-4, and the length of the phase shifter required is shortened to 12.03 mm. Such a short length is relatively easy in industrial production. In order to make the refractive index distribution more uniform, the carrier concentration has been optimized as 1 x 1017 cm-3 for p-type and 4 x 1017 cm-3 for n-type, respectively.
引用
收藏
页码:117 / 124
页数:8
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